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Research on ultra-smooth collimation separation of silicon wafer by multiple lasers 会议论文
Proceedings - 2020 3rd International Conference on Electron Device and Mechanical Engineering, ICEDME 2020, Suzhou, China, 2020-05-01
作者:  Youwang, Hu;  Ming, Li;  Qinqin, Xie;  Xiaoyan, Sun
Adobe PDF(328Kb)  |  收藏  |  浏览/下载:111/1  |  提交时间:2020/07/28
silicon wafer  laser  thermal cracking  prefabricated crack  
Optimization of the focusing characteristics of Fresnel zone plates fabricated with a femtosecond laser 期刊论文
JOURNAL OF MODERN OPTICS
作者:  Zhou, Fang;  Sun, Xiaoyan;  Zhong, Hongmin;  Duan, Lian;  Hu, Youwang;  Duan, Ji'an;  Li, Ming
Adobe PDF(1316Kb)  |  收藏  |  浏览/下载:84/2  |  提交时间:2021/02/22
Micro-optical components  Fresnel zone plates  focusing characteristics  femtosecond laser  fiber