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Theoretical Model of Thermal Stress in the Film-Substrate System of Optical Thin Film 期刊论文
JOURNAL OF ELECTRONIC MATERIALS, 2022, 卷号: 51, 期号: S10, 页码: 5937-5945
作者:  Shi, Yunyun;  Xu, Junqi;  Li, Yang;  Liu, Zheng;  Zhang, Kaifeng;  Su, Junhong
Adobe PDF(1273Kb)  |  收藏  |  浏览/下载：106/0  |  提交时间：2022/09/28
Films  thermal stress  composite beams  residual stress  
Study on the Influence of Deposition Temperature on the Properties of Lanthanum Titanate Films 会议论文
2022 IEEE 7TH OPTOELECTRONICS GLOBAL CONFERENCE, OGC, So Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen, PEOPLES R CHINA, 2022-12-06
作者:  Li, Yang;  Xu, Junqi;  Su, Junhong;  Liu, Zheng
Adobe PDF(4572Kb)  |  收藏  |  浏览/下载：56/1  |  提交时间：2023/06/16
component  Lanthanum titanate films  residual stress  surface morphology  finite element analysis(FEA)