Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics | |
Liu, X.1,2,3; Li, Q.3; Sikora, A.3; Sentis, M.3; Uteza, O.3; Stoian, R.4; Zhao, W.1![]() | |
作者部门 | 瞬态光学研究室 |
2019-03-04 | |
发表期刊 | OPTICS EXPRESS
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ISSN | 1094-4087 |
卷号 | 27期号:5页码:6996–7008 |
产权排序 | 1 |
摘要 | In order to control the length of micro-channels ablated at the surface of dielectrics, we use annular filtering apertures for tailoring the depth of focus of micrometric Gaussian-Bessel beams. We identify experimentally and numerically the appropriate beam truncation that promotes a smooth axial distribution of intensity with a small elongation, suitable for processing micro-channels of small aspect ratio. Single-shot channel fabrication is demonstrated on the front surface of a fused silica sample, with sub-micron diameter, high-quality opening, and depth of few micrometers, using 1 ps low-energy (< 0.45 mu J) pulse. Finally, we realize 10 x 10 matrices of densely packed channels with aspect ratio similar to 5 and a spatial period down to 1.5 mu m, as a prospective demonstration of direct laser fabrication of 2D photonic-crystal structures. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement |
DOI | 10.1364/OE.27.006996 |
收录类别 | SCI ; EI |
语种 | 英语 |
WOS记录号 | WOS:000460170000088 |
出版者 | OPTICAL SOC AMER |
EI入藏号 | 20191106643736 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/31318 |
专题 | 瞬态光学研究室 |
通讯作者 | Sanner, N. |
作者单位 | 1.Chinese Acad Sci, State Key Lab Transient Opt & Photon, Xian Inst Opt & Precis Mech, Xian 710119, Shaanxi, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.Aix Marseille Univ, CNRS, LP3 UMR 7341, F-13288 Marseille, France 4.Univ Jean Monnet, Univ Lyon, Labo Hubert Curien, UMR CNRS 5516, F-42000 St Etienne, France |
推荐引用方式 GB/T 7714 | Liu, X.,Li, Q.,Sikora, A.,et al. Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics[J]. OPTICS EXPRESS,2019,27(5):6996–7008. |
APA | Liu, X..,Li, Q..,Sikora, A..,Sentis, M..,Uteza, O..,...&Sanner, N..(2019).Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics.OPTICS EXPRESS,27(5),6996–7008. |
MLA | Liu, X.,et al."Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics".OPTICS EXPRESS 27.5(2019):6996–7008. |
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文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Truncated Gaussian-B(7478KB) | 期刊论文 | 出版稿 | 限制开放 | CC BY-NC-SA | 请求全文 |
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