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Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics
Liu, X.1,2,3; Li, Q.3; Sikora, A.3; Sentis, M.3; Uteza, O.3; Stoian, R.4; Zhao, W.1; Cheng, G.1; Sanner, N.3
Department瞬态光学技术国家重点实验室
2019-03-04
Source PublicationOPTICS EXPRESS
ISSN1094-4087
Volume27Issue:5Pages:6996–7008
Contribution Rank1
Abstract

In order to control the length of micro-channels ablated at the surface of dielectrics, we use annular filtering apertures for tailoring the depth of focus of micrometric Gaussian-Bessel beams. We identify experimentally and numerically the appropriate beam truncation that promotes a smooth axial distribution of intensity with a small elongation, suitable for processing micro-channels of small aspect ratio. Single-shot channel fabrication is demonstrated on the front surface of a fused silica sample, with sub-micron diameter, high-quality opening, and depth of few micrometers, using 1 ps low-energy (< 0.45 mu J) pulse. Finally, we realize 10 x 10 matrices of densely packed channels with aspect ratio similar to 5 and a spatial period down to 1.5 mu m, as a prospective demonstration of direct laser fabrication of 2D photonic-crystal structures. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

DOI10.1364/OE.27.006996
Indexed BySCI ; EI
Language英语
WOS IDWOS:000460170000088
PublisherOPTICAL SOC AMER
EI Accession Number20191106643736
Citation statistics
Document Type期刊论文
Identifierhttp://ir.opt.ac.cn/handle/181661/31318
Collection瞬态光学技术国家重点实验室
Corresponding AuthorSanner, N.
Affiliation1.Chinese Acad Sci, State Key Lab Transient Opt & Photon, Xian Inst Opt & Precis Mech, Xian 710119, Shaanxi, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
3.Aix Marseille Univ, CNRS, LP3 UMR 7341, F-13288 Marseille, France
4.Univ Jean Monnet, Univ Lyon, Labo Hubert Curien, UMR CNRS 5516, F-42000 St Etienne, France
Recommended Citation
GB/T 7714
Liu, X.,Li, Q.,Sikora, A.,et al. Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics[J]. OPTICS EXPRESS,2019,27(5):6996–7008.
APA Liu, X..,Li, Q..,Sikora, A..,Sentis, M..,Uteza, O..,...&Sanner, N..(2019).Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics.OPTICS EXPRESS,27(5),6996–7008.
MLA Liu, X.,et al."Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics".OPTICS EXPRESS 27.5(2019):6996–7008.
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