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Research on the properties of Ta2O5optical films prepared with APS plasma assisted deposition 会议论文
Seventh Asia Pacific Conference on Optics Manufacture, APCOM 2021, Shanghai, China, 2021-10-28
作者:  Pan, Yong-Gang;  Liu, Zheng;  Liu, Wen-Cheng;  Li, Mian;  Zhang, Si-Bao;  Luo, Chang-Xin;  Zhang, Chun-Juan
Adobe PDF(833Kb)  |  收藏  |  浏览/下载：167/2  |  提交时间：2022/03/18
Thin films  APS plasma assisted deposition  stress  refractive index  
Study on the Influence of Deposition Temperature on the Properties of Lanthanum Titanate Films 会议论文
2022 IEEE 7TH OPTOELECTRONICS GLOBAL CONFERENCE, OGC, So Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen, PEOPLES R CHINA, 2022-12-06
作者:  Li, Yang;  Xu, Junqi;  Su, Junhong;  Liu, Zheng
Adobe PDF(4572Kb)  |  收藏  |  浏览/下载：52/1  |  提交时间：2023/06/16
component  Lanthanum titanate films  residual stress  surface morphology  finite element analysis(FEA)