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Removal functions of different polishing heads worked in planet motion model 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 10, 页码: 2706-2713
作者:  Yao, Yong-Sheng;  Ma, Zhen;  Xu, Liang;  Ding, Jiao-Teng;  Wang, Yong-Jie;  Shen, Le;  Jiang, Bo
Adobe PDF(577Kb)  |  收藏  |  浏览/下载：166/0  |  提交时间：2018/12/12
Meter-scale thin film coating equipment based on meniscus-coating technology 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 1, 页码: 133-140
作者:  Xu, Jia;  Xu, Wen-Bin;  Bu, He-Yang;  Lu, Zheng-Wu;  Liu, Zheng-Kun;  Hong, Yi-Lin;  Yu, Wei-Xing;  Yu, Wei-Xing (yuwx@opt.ac.cn)
Adobe PDF(598Kb)  |  收藏  |  浏览/下载：220/1  |  提交时间：2017/06/02