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Design of a large-range dispersive objective for line-sweep spectral confocal displacement sensors
Yang, Weiguang1,2; Qi, Meijie1; Yan, Jiayue1,2; Cheng, Mohan1,2; Zhang, Zhoufeng1
2024
会议名称6th Conference on Frontiers in Optical Imaging and Technology: Novel Technologies in Optical Systems
会议录名称Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Technologies in Optical Systems
卷号13153
会议日期2023-10-22
会议地点Nanjing, China
出版者SPIE
产权排序1
摘要Spectral Confocal Displacement Sensor is a new type of displacement sensor that can meet the requirements of high precision, high speed and non-destructive testing, and can be applied in aerospace, medical and industrial testing fields. The traditional point-scan spectral confocal displacement sensor only collects depth information of one point at a time, which is slow and has a large amount of back-end data. In order to improve the scanning speed of the point-scan spectral confocal displacement sensor and reduce the workload of data processing, it is proposed to extend the point-scan type to line-scan type, which can obtain the depth information of thousands of points at one time, improve the scanning speed and reduce the workload of data processing by processing all the points on the scanning line at one time. Aiming at the dispersive objective lens design in the line-scan spectral confocal displacement sensor, a dispersive lens with a large linear dispersion range is designed based on the principle of linear axial chromatic aberration design. The lens consists of four single lenses and two double-glued lenses and a beam-splitting prism, in order to solve the problem of energy uniformity into the spectrometer and the problem of uniformity of illumination on the image surface, the double telecentric optical path design is adopted, and the size of the detector element selected is 5.5 um, and the Nyquist cutoff frequency is 91 Lp/mm. The design results show that: the dispersive range of the lens reaches 3 mm, and the length of the scanning line reaches 10 mm. At the Nyquist cutoff frequency, the MTF value of the whole field of view is greater than 0.6, which indicates that the system has good imaging quality. © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.
关键词spectral confocal precision measurement dispersive objective double telecentric lens optical design
作者部门光谱成像技术研究室
DOI10.1117/12.3013278
收录类别EI
ISBN号9781510679665
语种英语
ISSN号0277786X;1996756X
EI入藏号20242016087065
引用统计
文献类型会议论文
条目标识符http://ir.opt.ac.cn/handle/181661/97475
专题光谱成像技术研究室
作者单位1.Laboratory of Spectral Imaging Technology, Xi'an Institute of Optical Precision and Mechanical Research, Chinese Academy of Sciences, Shaanxi, Xi'an; 710119, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
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Yang, Weiguang,Qi, Meijie,Yan, Jiayue,et al. Design of a large-range dispersive objective for line-sweep spectral confocal displacement sensors[C]:SPIE,2024.
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