Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism | |
Jiang, Bo1; Dong, Yiming1,2; Zhang, Zijie1,3; Li, Xiangyu1; Wei, Yuxuan1; Guo, Yifan1,3; Liu, Haixia4 | |
作者部门 | 光电跟踪与测量技术研究室 |
2024-05 | |
发表期刊 | APPLIED SCIENCES-BASEL |
ISSN | 2076-3417 |
卷号 | 14期号:9 |
产权排序 | 1 |
摘要 | In light of recent advancements in synchrotron radiation technology and nano-technology, there has been a marked increase in the need for ultra-precision nano-positioning mechanisms. This paper presents a method that integrates physical models with multi-objective optimization for developing an optical angle nano-positioning mechanism. We begin by examining the actual motion law of the mechanism, based on kinematic principles. The outcomes from this kinematic analysis facilitate a static analysis of the flexible hinge, identified as a critical component of the mechanism. Subsequently, we establish a dynamic model for the entire mechanism. By employing the physical model as a base and combining it with the optimization algorithm, we identify the optimal design parameters for the mechanism. The design achieves a resolution of 50 nrad and meets the specified requirements. The first-order inherent frequency of the mechanism is approximately 43.75 Hz. There is a discrepancy of 2.63% from the finite element modal analysis results and a 3.33% difference from the theoretical analysis results, validating the reliability of the design method proposed in this study. |
关键词 | nano-positioning mechanisms synchrotron radiation facility multi-objective optimization |
DOI | 10.3390/app14093756 |
收录类别 | SCI |
语种 | 英语 |
WOS记录号 | WOS:001219818800001 |
出版者 | MDPI |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/97470 |
专题 | 光电跟踪与测量技术研究室 |
通讯作者 | Liu, Haixia |
作者单位 | 1.Xian Univ Architecture & Technol, Sch Mech & Elect Engn, Xian 710055, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.Xian Technol Univ, Sch Optoelect Engn, Xian 710021, Peoples R China 4.Xian Univ Architecture & Technol, Sch Mech & Elect Engn, Xian 710055, Peoples R China |
推荐引用方式 GB/T 7714 | Jiang, Bo,Dong, Yiming,Zhang, Zijie,et al. Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism[J]. APPLIED SCIENCES-BASEL,2024,14(9). |
APA | Jiang, Bo.,Dong, Yiming.,Zhang, Zijie.,Li, Xiangyu.,Wei, Yuxuan.,...&Liu, Haixia.(2024).Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism.APPLIED SCIENCES-BASEL,14(9). |
MLA | Jiang, Bo,et al."Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism".APPLIED SCIENCES-BASEL 14.9(2024). |
条目包含的文件 | ||||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Integrating a Physic(2931KB) | 期刊论文 | 出版稿 | 限制开放 | CC BY-NC-SA | 请求全文 |
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