月球与深空探测技术研究室知识库

With the rapid development of industry, semiconductor, aerospace and other industries, the device processing size is getting smaller and smaller, and the positioning accuracy of high-end equipment is becoming higher and higher in recent years, the development level of precision positioning technology, to a certain extent, characterizes a country's scientific and technological strength, and reflects the country's comprehensive national strength. From aviation and aerospace to the lithography industry directly related to various chips, precision engineering technology plays an important role in them. Control accuracy is often a very important indicator to measure whether the control environment meets the requirements. In this paper, permanent magnet synchronous linear motor is used to compare the influence of various algorithms on the control accuracy of the motor. This paper mainly conducts in-depth research on the control algorithms and compares various performance indicators of different algorithms in the same working environment. First of all, the control principle and core points of PID control algorithm, SMG sliding mode control algorithm and ADRC active disturbance rejection control algorithm are briefly described. The control system block diagram of these three control algorithms is given, and the advantages and disadvantages of these three control algorithms are expounded. The permanent magnet synchronous linear motor control system modeling is carried out on matlab/simulink. Then use matlab/simulink to carry out these three control algorithms for the motor control simulation and control experiment, modify the parameters and then compare the simulation results, and point out which algorithm is better in the control environment. © 2023 SPIE.