Emerging material platforms for integrated microcavity photonics | |
Liu, Jin1; Bo, Fang2,3; Chang, Lin4; Dong, Chun-Hua5; Ou, Xin6; Regan, Blake7; Shen, Xiaoqin8; Song, Qinghai9; Yao, Baicheng10; Zhang, Wenfu11; Zou, Chang-Ling5; Xiao, Yun-Feng12,13 | |
作者部门 | 瞬态光学研究室 |
2022-10 | |
发表期刊 | SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY
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ISSN | 1674-7348;1869-1927 |
卷号 | 65期号:10 |
产权排序 | 11 |
摘要 | Many breakthroughs in technologies are closely associated with the deep understanding and development of new material platforms. As the main material used in microelectronics, Si also plays a leading role in the development of integrated photonics. The indirect bandgap, absence of chi((2)) nonlinearity and the parasitic nonlinear absorptions at the telecom band of Si imposed technological bottlenecks for further improving the performances and expanding the functionalities of Si microcavities in which the circulating light intensity is dramatically amplified. The past two decades have witnessed the burgeoning of the novel material platforms that are compatible with the complementary metal-oxide-semiconductor (COMS) process. In particular, the unprecedented optical properties of the emerging materials in the thin film form have resulted in revolutionary progress in microcavity photonics. In this review article, we summarize the recently developed material platforms for integrated photonics with the focus on chip-scale microcavity devices. The material characteristics, fabrication processes and device applications have been thoroughly discussed for the most widely used new material platforms. We also discuss open challenges and opportunities in microcavity photonics, such as heterogeneous integrated devices, and provide an outlook for the future development of integrated microcavities. |
关键词 | microcavity integrated optics nonlinear optics |
DOI | 10.1007/s11433-022-1957-3 |
收录类别 | SCI |
语种 | 英语 |
WOS记录号 | WOS:000850063100003 |
出版者 | SCIENCE PRESS |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/96144 |
专题 | 瞬态光学研究室 |
通讯作者 | Liu, Jin |
作者单位 | 1.Sun Yat Sen Univ, Sch Phys, State Key Lab Optoelect Mat & Technol, Guangzhou 510000, Peoples R China 2.Nankai Univ, TEDA Inst Appl Phys, MOE Key Lab Weak Light Nonlinear Photon, Tianjin 300071, Peoples R China 3.Nankai Univ, Sch Phys, Tianjin 300071, Peoples R China 4.Peking Univ, Sch Elect, State Key Lab Adv Opt Commun Syst & Networks, Beijing 100871, Peoples R China 5.Univ Sci & Technol China, CAS Key Lab Quantum Informat, Hefei 230026, Peoples R China 6.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China 7.Univ Technol Sydney, Sch Math & Phys Sci, Ultimo 2007, Australia 8.ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 201210, Peoples R China 9.Harbin Inst Technol, Minist Ind & Informat Technol, Key Lab Micronano Optoelect Informat Syst, Shenzhen 518055, Peoples R China 10.Univ Elect Sci & Technol China, Minist Educ, Key Lab Opt Fiber Sensing & Commun, Chengdu 611731, Peoples R China 11.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Peoples R China 12.Peking Univ, State Key Lab Mesoscop Phys, Sch Phys, Beijing 100871, Peoples R China 13.Peking Univ, Frontiers Sci Ctr Nanooptoelect, Sch Phys, Beijing 100871, Peoples R China |
推荐引用方式 GB/T 7714 | Liu, Jin,Bo, Fang,Chang, Lin,et al. Emerging material platforms for integrated microcavity photonics[J]. SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,2022,65(10). |
APA | Liu, Jin.,Bo, Fang.,Chang, Lin.,Dong, Chun-Hua.,Ou, Xin.,...&Xiao, Yun-Feng.(2022).Emerging material platforms for integrated microcavity photonics.SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,65(10). |
MLA | Liu, Jin,et al."Emerging material platforms for integrated microcavity photonics".SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY 65.10(2022). |
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文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Emerging material pl(801KB) | 期刊论文 | 出版稿 | 限制开放 | CC BY-NC-SA | 请求全文 |
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