Design and analysis of a moving mirror supporting mechanism for fourier transform spectroscopy

doi:10.1109/ICEDME50972.2020.00129

OPT OpenIR > 光谱成像技术研究室

	Design and analysis of a moving mirror supporting mechanism for fourier transform spectroscopy
	Tian, Feifei 1,2; Li, Siyuan 1
	2020-05
会议名称	3rd International Conference on Electron Device and Mechanical Engineering, ICEDME 2020
会议录名称	Proceedings - 2020 3rd International Conference on Electron Device and Mechanical Engineering, ICEDME 2020
页码	540-544
会议日期	2020-05-01
会议地点	Suzhou, China
出版者	Institute of Electrical and Electronics Engineers Inc.
产权排序	1
摘要	Moving mirror supporting mechanism is a key component of Fourier transform spectrometer(FTS), its motion precision and the maximum range of travel affect the performance of the instrument. Based on the double parallelogram structure, a symmetrical flexible moving mirror supporting mechanism is designed. Simulation results show the system permits ± 5 mm of mirror travel with the tilt value of less than ±4.8urad and the shear value of less than 3um. Excellent shear performance and tilt performance make it well suited for most FTS instruments. © 2020 IEEE.
关键词	supporting mechanism FTS maximum range of travel tilt shear
作者部门	光谱成像技术研究室
DOI	10.1109/ICEDME50972.2020.00129
收录类别	EI
ISBN号	9781728181455
语种	英语
EI入藏号	20202908946747
引用统计
文献类型	会议论文
条目标识符	http://ir.opt.ac.cn/handle/181661/93590
专题	光谱成像技术研究室
通讯作者	Li, Siyuan
作者单位	1.Chinese Academy of Sciences, Xi'An Institute of Optics and Precision Mechanics, Xi'an, China; 2.University of Chinese Academy of Sciences, Beijing, China
推荐引用方式 GB/T 7714	Tian, Feifei,Li, Siyuan. Design and analysis of a moving mirror supporting mechanism for fourier transform spectroscopy[C]:Institute of Electrical and Electronics Engineers Inc.,2020:540-544.

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