Design and analysis of a moving mirror supporting mechanism for fourier transform spectroscopy | |
Tian, Feifei1,2; Li, Siyuan1 | |
2020-05 | |
会议名称 | 3rd International Conference on Electron Device and Mechanical Engineering, ICEDME 2020 |
会议录名称 | Proceedings - 2020 3rd International Conference on Electron Device and Mechanical Engineering, ICEDME 2020 |
页码 | 540-544 |
会议日期 | 2020-05-01 |
会议地点 | Suzhou, China |
出版者 | Institute of Electrical and Electronics Engineers Inc. |
产权排序 | 1 |
摘要 | Moving mirror supporting mechanism is a key component of Fourier transform spectrometer(FTS), its motion precision and the maximum range of travel affect the performance of the instrument. Based on the double parallelogram structure, a symmetrical flexible moving mirror supporting mechanism is designed. Simulation results show the system permits ± 5 mm of mirror travel with the tilt value of less than ±4.8urad and the shear value of less than 3um. Excellent shear performance and tilt performance make it well suited for most FTS instruments. © 2020 IEEE. |
关键词 | supporting mechanism FTS maximum range of travel tilt shear |
作者部门 | 光谱成像技术研究室 |
DOI | 10.1109/ICEDME50972.2020.00129 |
收录类别 | EI |
ISBN号 | 9781728181455 |
语种 | 英语 |
EI入藏号 | 20202908946747 |
引用统计 | |
文献类型 | 会议论文 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/93590 |
专题 | 光谱成像技术研究室 |
通讯作者 | Li, Siyuan |
作者单位 | 1.Chinese Academy of Sciences, Xi'An Institute of Optics and Precision Mechanics, Xi'an, China; 2.University of Chinese Academy of Sciences, Beijing, China |
推荐引用方式 GB/T 7714 | Tian, Feifei,Li, Siyuan. Design and analysis of a moving mirror supporting mechanism for fourier transform spectroscopy[C]:Institute of Electrical and Electronics Engineers Inc.,2020:540-544. |
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