Manufacture of fixed-output semiconductor laser element

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	Manufacture of fixed-output semiconductor laser element
其他题名	Manufacture of fixed-output semiconductor laser element
	HANAMITSU YUKIKAZU; KOTADO SETSUO
	1986-06-11
专利权人	ANRITSU CORP
公开日期	1986-06-11
授权国家	日本
专利类型	发明申请
摘要	PURPOSE:To obtain a low-cost semiconductor laser, which is small-sized and has high reliability, and in which the work of the alignment of an optical axis, etc. is not required, by disposing a semiconductor laser, an optical waveguide branching path, a photodiode, a semiconductor thermocouple element, a FET as a driving circuit, and an impedance onto the same substrate through a prede termined process. CONSTITUTION:An optical waveguide 11 is formed onto an insulating substrate 1, a pedestal for a LD is shaped at an input terminal 22, and a recessed sectio 4 for a photodetector is formed to the intermediate section of an optical waveguide 2 at a position where heat from the pedestal 3 is not diffused and transmitted. An electrode 5 connecting the surface of the pedestal 3 and the prescribed position 11 of the surface of the substrate 1 is shaped. A LD 6 is formed to the pedestal 3, a driving circuit 7 consisting of a FET at the predeter mined position 11 of the substrate and a photodetecting element 8 into the recessed section 4. Signals from the element 8 are fed back to the circuit 7, and a wiring 9 for keeping outputs from the LD 6 constat is shaped, thus consti tuting a fixed-output semiconductor laser element.
其他摘要	目的：通过设置半导体激光器，光波导分支，获得小尺寸，高可靠性且不需要光轴对准等工作的低成本半导体激光器路径，光电二极管，半导体热电偶元件，作为驱动电路的FET，以及通过预定工艺在同一衬底上的阻抗。组成：光波导11形成在绝缘基板1上，用于LD的基座在输入端子22处成形，并且用于光电探测器的凹陷部分4形成在光波导2的中间部分的位置处。来自基座3的热量不会扩散和传播。连接基座3的表面和基板1的表面的规定位置11的电极5成形。在基座3上形成LD6，在基板的预定位置11处由FET构成的驱动电路7和在凹陷部分4中的光电检测元件8构成。来自元件8的信号被反馈到电路7。用于保持来自LD 6恒定输出的输出的配线9成形，从而构成固定输出的半导体激光元件。
申请日期	1984-10-26
专利号	JP1986123190A
专利状态	失效
申请号	JP1984224117
公开（公告）号	JP1986123190A
IPC 分类号	H01S5/00 \| G02B6/43 \| H01S5/026 \| H01S5/068 \| H01S3/133 \| H01S3/18
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/88545
专题	半导体激光器专利数据库
作者单位	ANRITSU CORP
推荐引用方式 GB/T 7714	HANAMITSU YUKIKAZU,KOTADO SETSUO. Manufacture of fixed-output semiconductor laser element. JP1986123190A[P]. 1986-06-11.

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