Xi'an Institute of Optics and Precision Mechanics,CAS
Liquid phase epitaxial growth method | |
其他题名 | Liquid phase epitaxial growth method |
ISHINO MASATO; SASAI YOICHI; KUBO MINORU | |
1988-05-30 | |
专利权人 | MATSUSHITA ELECTRIC IND CO LTD |
公开日期 | 1988-05-30 |
授权国家 | 日本 |
专利类型 | 发明申请 |
摘要 | PURPOSE:To reduce the deformation of a diffraction grating generated by a melt back by a method wherein an LPE growing method is performed using the growing boat on which the region contacting to the grown melt necessary for formation of an epitaxial layer is formed using a non-porous material. CONSTITUTION:The epitaxial substrate 15, having a diffraction grating formed on the surface, is inserted into the recessed part of a slider 9. A grown melt 11 is inserted into the growth vessel 12 in a melt holder 10, and a weight 13 is mounted. SiC film 14 is coated as a non-porous material on the side wall of the growth vessel 12, the slider 9 and the bottom face of the weight 13. The SiC film 14 prevents the absorption of the grown melt 11 into porous graphite, the film 14 suppresses the formation of three-dimensional nucleus through the intermediary of the absorbed solute, and also it performs the function of lowering the degree of supersaturation of the melt 1 As a result, the deformation of the diffraction grating caused by a melt-back can be reduced. |
其他摘要 | 目的:通过一种方法减少由熔体返回产生的衍射光栅的变形,其中使用生长船进行LPE生长方法,在该生长舟上使用非形成与形成外延层所需的生长熔体接触的区域多孔材料。组成:在表面上形成有衍射光栅的外延基板15插入滑块9的凹陷部分。将生长的熔体11插入熔体支架10中的生长容器12中,并安装重物13 。 SiC膜14作为无孔材料涂覆在生长容器12的侧壁,滑块9和配重13的底面上.SiC膜14防止生长的熔体11吸收到多孔石墨中,薄膜14通过被吸收的溶质的中介抑制三维核的形成,并且还起到降低熔体11的过饱和度的作用。结果,由熔化引起的衍射光栅的变形 - 回来可以减少。 |
申请日期 | 1986-11-14 |
专利号 | JP1988126218A |
专利状态 | 失效 |
申请号 | JP1986272503 |
公开(公告)号 | JP1988126218A |
IPC 分类号 | H01L21/208 | H01S5/00 | H01S3/18 |
专利代理人 | - |
代理机构 | - |
文献类型 | 专利 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/83322 |
专题 | 半导体激光器专利数据库 |
作者单位 | MATSUSHITA ELECTRIC IND CO LTD |
推荐引用方式 GB/T 7714 | ISHINO MASATO,SASAI YOICHI,KUBO MINORU. Liquid phase epitaxial growth method. JP1988126218A[P]. 1988-05-30. |
条目包含的文件 | ||||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
JP1988126218A.PDF(403KB) | 专利 | 开放获取 | CC BY-NC-SA | 请求全文 |
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