Xi'an Institute of Optics and Precision Mechanics,CAS
Light emitting element | |
其他题名 | Light emitting element |
KAYANE NAOKI; NAKAJIMA HISAO; OKAI MAKOTO; TSUJI SHINJI | |
1988-12-06 | |
专利权人 | HITACHI LTD |
公开日期 | 1988-12-06 |
授权国家 | 日本 |
专利类型 | 发明申请 |
摘要 | PURPOSE:To obtain a light emitting element in which a light distribution can be confined by disordering even in a wavelength band of 1-6mum by containing In but not containing P in the component element of a compound semiconductor film. CONSTITUTION:A P-type InP clad layer 2 (1mum thick), an undoped InGaA As/ InGaAs superlattice layer 3 (lnGaA As: 100Angstrom thick, InA As: 100Angstrom thick, each with 5 layers), an N-type InP clad layer 5 (5mum thick), and an N-type InGaAs layer 6 (0.5mum thick) are sequentially laminated by an organic metal vapor growing method on a P-type InP substrate Thereafter, Zn is diffused in a region 7 by a selectively diffusing method. The Zn-diffused section 4 of the superlattice layer becomes by disordering lnGaAlAs layer of mean composition. Then, it is covered with an insulating film 8, and an AnGeNi-Au electrode 9 is deposited. Subsequently, a Cr-Au electrode 10 is deposited on the rear face of the substrate, and isolated into chips by cleaving and scribing. When a current flows to the element, carrier is injected to the InGaAs layer of the layer 3 to radiate light. The emitted light wavelength is 55mum. |
其他摘要 | 目的:通过在化合物半导体膜的组成元素中含有In但不含P,即使在1-6μm的波段中也可以通过无序化来限制光分布的发光元件。组成:P型InP包层2(1mum厚),未掺杂的InGaA As / InGaAs超晶格层3(lnGaA As:100埃厚,InA As:100埃厚,每层有5层),N型InP包层通过有机金属气相生长法在P型InP衬底1上依次层叠5(5μm厚)和N型InGaAs层6(0.5μm厚)。之后,Zn在区域7中通过a扩散选择性扩散方法。超晶格层的Zn扩散部分4变成无序的平均组成的InGaAlAs层。然后,用绝缘膜8覆盖,沉积AnGeNi-Au电极9。随后,将Cr-Au电极10沉积在基板的背面上,并通过切割和划线将其分离成芯片。当电流流到元件时,载流子被注入层3的InGaAs层以辐射光。发射的光波长为55μm。 |
申请日期 | 1987-05-29 |
专利号 | JP1988299186A |
专利状态 | 失效 |
申请号 | JP1987131125 |
公开(公告)号 | JP1988299186A |
IPC 分类号 | H01L33/06 | H01L33/14 | H01L33/30 | H01L33/40 | H01L33/44 | H01S5/00 | H01S5/20 | H01S5/223 | H01S5/343 | H01L33/00 | H01S3/18 |
专利代理人 | - |
代理机构 | - |
文献类型 | 专利 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/77584 |
专题 | 半导体激光器专利数据库 |
作者单位 | HITACHI LTD |
推荐引用方式 GB/T 7714 | KAYANE NAOKI,NAKAJIMA HISAO,OKAI MAKOTO,et al. Light emitting element. JP1988299186A[P]. 1988-12-06. |
条目包含的文件 | ||||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
JP1988299186A.PDF(148KB) | 专利 | 开放获取 | CC BY-NC-SA | 请求全文 |
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