Substrate for optical circuit

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	Substrate for optical circuit
其他题名	Substrate for optical circuit
	WASA KIYOTAKA; KAWAGUCHI TAKAO; KICHI KENZOU; MITSUYU TSUNEO
	1982-10-07
专利权人	MATSUSHITA DENKI SANGYO KK
公开日期	1982-10-07
授权国家	日本
专利类型	发明申请
摘要	PURPOSE:To obtain the titled substrate having a smoothed surface for transmission of the light and an optical waveguide having a clear boundary, by coating an amorphous thin layer on the inner side wall of a U-shaped groove provided on the surface of a crystalline substrate and then burying an optical waveguide into the U-shaped groove. CONSTITUTION:A U-shaped groove 21 is formed on the surface of a crystalline substrate 22 made of one of MgO, alpha-Al2O3, spinel, SrTiO3, etc. An amorphous material like the quartz glass, the silica glass, the borosilicate glass, etc. is vapor-deposited into the groove 21 by an extent equivalent to the depth of the groove 2 The center part of the amorphous material is removed so as to expose the substrate 22, and an amorphous thin layer 23 is formed on the inner wall surface of the groove 2 Then a crystalline light transmitting medium of BaTiO3, PbTiO3, the PLZT group compound, etc. having a larger refractive index of light than the substrate 22 and the layer 23 is buried into the groove 21 to form an optical waveguide 24. Thus the width accuracy of the waveguide 24 can be set at <=1mum to obtain a small-sized thin film waveguide having high performance.
其他摘要	目的：通过在结晶基板表面上设置的U形槽的内侧壁上涂覆非晶薄层，获得具有光滑表面以传输光的标题基板和具有清晰边界的光波导然后将光波导埋入U形槽中。组成：U形槽21形成在由MgO，α-Al2O3，尖晶石，SrTiO3等之一制成的结晶基板22的表面上。非晶材料如石英玻璃，石英玻璃，硼硅酸盐玻璃，以与槽21的深度相当的程度将气相沉积到槽21中。去除非晶材料的中心部分以暴露基板22，并在内部形成非晶薄层23。然后，将具有比基板22和层23更大的光折射率的BaTiO 3，PbTiO 3，PLZT基化合物等的晶体光传输介质埋入槽21中以形成光学器件。因此，波导24的宽度精度可以设定为<=1μm，以获得具有高性能的小尺寸薄膜波导。
主权项	-
申请日期	1981-03-31
专利号	JP1982163207A
专利状态	失效
申请号	JP1981049112
公开（公告）号	JP1982163207A
IPC 分类号	G02B6/122 \| H01L27/15 \| H01S5/00 \| G02B5/174 \| H01S3/18
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/64681
专题	半导体激光器专利数据库
作者单位	MATSUSHITA DENKI SANGYO KK
推荐引用方式 GB/T 7714	WASA KIYOTAKA,KAWAGUCHI TAKAO,KICHI KENZOU,et al. Substrate for optical circuit. JP1982163207A[P]. 1982-10-07.