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Optical device for characteristic inspection of photosemiconductor element
其他题名Optical device for characteristic inspection of photosemiconductor element
TADA TOSHIO
1988-02-04
专利权人NEC CORP
公开日期1988-02-04
授权国家日本
专利类型发明申请
摘要PURPOSE:To eliminate the need to adjust the optical axis to a laser diode and to improve the efficiency of inspecting operation and the accuracy of measurement by combining and uniting a large-diameter handle fiber, a long-focus lens, and a short-focus lens. CONSTITUTION:The laser diode 1 as an object of inspection is fitted nearby the incidence port 2a of the large-diameter handle fiber 2 and light is emitted by an external power source, made incident on the incidence part 2a, and projected from a projection port 2b on the other end surface. A collimator lens 3 with long focus (f1) is provided behind the handle fiber 2 to make the incident light parallel. The spherical lens 4 with extremely short focus (f2) is provided behind the lens 3 and the incident light is made incident on a small-diameter photodetector 5 through this lens and converted here into an electric signal, which is sent to a characteristic inspecting device. Those handle fiber 2, lens 3, lens 4, and photodetector 5 are coupled in one body while their optical axes are aligned with one another.
其他摘要用途:通过组合和组合大直径手柄光纤,长焦镜头和短焦点,无需调整光轴到激光二极管,提高检查操作效率和测量精度镜片。组成:作为检查对象的激光二极管1安装在大直径手柄光纤2的入射端口2a附近,并且光由外部电源发射,入射到入射部分2a,并从投影端口投射2b在另一个端面上。具有长焦距(f1)的准直透镜3设置在手柄光纤2的后面,以使入射光平行。具有极短焦距(f2)的球面透镜4设置在透镜3的后面,并且入射光通过该透镜入射到小直径光电探测器5上并在此转换成电信号,该电信号被发送到特征检查装置。 。这些处理光纤2,透镜3,透镜4和光电探测器5在一个主体中耦合,同时它们的光轴彼此对准。
主权项-
申请日期1986-07-18
专利号JP1988026545A
专利状态失效
申请号JP1986170205
公开(公告)号JP1988026545A
IPC 分类号H01L21/66 | G01J1/00 | G01M11/00 | H01S5/00 | H01S3/18
专利代理人-
代理机构-
文献类型专利
条目标识符http://ir.opt.ac.cn/handle/181661/63035
专题半导体激光器专利数据库
作者单位NEC CORP
推荐引用方式
GB/T 7714
TADA TOSHIO. Optical device for characteristic inspection of photosemiconductor element. JP1988026545A[P]. 1988-02-04.
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