Optical displacement-detecting mechanism and probe microscope using the same

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	Optical displacement-detecting mechanism and probe microscope using the same
其他题名	Optical displacement-detecting mechanism and probe microscope using the same
	IYOKI, MASATO; YAMAMOTO, HIROYOSHI; WATANABE, KAZUTOSHI
	2008-02-28
专利权人	HITACHI HIGH-TECH SCIENCE CORPORATION
公开日期	2008-02-28
授权国家	美国
专利类型	发明申请
摘要	The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.
其他摘要	光学位移检测机构具有：光源，用于照射用于测量的目标;用于驱动光源的光源驱动电路;光学探测器，由半导体制成，用于在用光源测量的目标照射后接收光并将光转换成电信号，从而检测光的强度;以及放大器，包括电流 - 电压转换电路，用于以预定的放大系数对光检测器的检测信号进行电流 - 电压转换。在光学位移检测机构中，使用具有10nm或更大的光谱半宽度的光源，由此可以以2mW或更大的输出功率驱动光源，而不产生模跳跃噪声和光学反馈噪声。
主权项	An optical displacement-detecting mechanism, comprising: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and a current-voltage conversion circuit for processing a detection signal of the optical detector with a predetermined amplification factor, wherein when intensity spectra of the light source are measured with respect to a wavelength, a half width of the spectrum having a maximum intensity is not less than 10 nm, and the light source is driven with an output power of not less than 2 mW.
申请日期	2007-08-17
专利号	US20080049223A1
专利状态	授权
申请号	US11/840549
公开（公告）号	US20080049223A1
IPC 分类号	G01J4/00 \| G01B11/14 \| G01N21/47 \| G01B11/00 \| G01C3/06 \| G01Q20/02 \| G01Q30/14 \| G01Q60/24
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/62517
专题	半导体激光器专利数据库
作者单位	HITACHI HIGH-TECH SCIENCE CORPORATION
推荐引用方式 GB/T 7714	IYOKI, MASATO,YAMAMOTO, HIROYOSHI,WATANABE, KAZUTOSHI. Optical displacement-detecting mechanism and probe microscope using the same. US20080049223A1[P]. 2008-02-28.