Surface-emitting laser element, surface-emitting laser array, optical scanning apparatus, image forming apparatus, and method of manufacturing surface-emitting laser element

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	Surface-emitting laser element, surface-emitting laser array, optical scanning apparatus, image forming apparatus, and method of manufacturing surface-emitting laser element
其他题名	Surface-emitting laser element, surface-emitting laser array, optical scanning apparatus, image forming apparatus, and method of manufacturing surface-emitting laser element
	HIGASHI, YASUHIRO; HARASAKA, KAZUHIRO
	2012-04-12
专利权人	RICOH COMPANY, LTD.
公开日期	2012-04-12
授权国家	美国
专利类型	发明申请
摘要	A method of manufacturing a surface-emitting laser element having a light-emitting mesa structure with an emitting area including a high-reflectance portion and a low-reflectance portion includes forming a layered body that includes a lower reflecting mirror, a cavity structure, and an upper reflecting mirror on a substrate; forming a first area on an upper surface of the layered body; forming a second area having the same size as the first area on the upper surface of the layered body; forming a light-emitting mesa structure and a monitoring-mesa structure by etching the first area and the second area, respectively; forming a confinement structure including a current passage area surrounded by an oxide in the light-emitting mesa structure and the monitoring-mesa structure; and measuring the size of the current passage area of the monitoring-mesa structure.
其他摘要	一种制造具有发光台面结构的表面发射激光器元件的方法，所述发光台面结构具有包括高反射率部分和低反射率部分的发射区域，包括形成包括下反射镜，腔结构和基板上的上反射镜;在层状体的上表面上形成第一区域;形成与层叠体的上表面上的第一区域具有相同尺寸的第二区域;通过分别蚀刻第一区域和第二区域形成发光台面结构和监测台面结构;形成限制结构，包括由发光台面结构中的氧化物围绕的电流通道区域和监测台面结构;并测量监测台面结构的当前通道面积的大小。
主权项	A surface-emitting laser element comprising: a substrate; a light-emitting mesa structure; and a monitoring-mesa structure disposed near the light-emitting mesa structure, wherein the light-emitting mesa structure includes a lower reflecting minor, a cavity structure including an active layer, and an upper reflecting minor having a confinement structure in which a current passage area is surrounded by an oxide, wherein an emitting area of the light-emitting mesa structure includes a high reflectance portion and a low reflectance portion, and wherein the monitoring-mesa structure is configured to monitor the size of the current passage area.
申请日期	2010-05-26
专利号	US20120086765A1
专利状态	授权
申请号	US13/258596
公开（公告）号	US20120086765A1
IPC 分类号	B41J2/435 \| H01S5/18 \| H01L21/66
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/61638
专题	半导体激光器专利数据库
作者单位	RICOH COMPANY, LTD.
推荐引用方式 GB/T 7714	HIGASHI, YASUHIRO,HARASAKA, KAZUHIRO. Surface-emitting laser element, surface-emitting laser array, optical scanning apparatus, image forming apparatus, and method of manufacturing surface-emitting laser element. US20120086765A1[P]. 2012-04-12.