Scribing sapphire substrates with a solid state UV laser with edge detection

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	Scribing sapphire substrates with a solid state UV laser with edge detection
其他题名	Scribing sapphire substrates with a solid state UV laser with edge detection
	LIU, KUO-CHING; FANG, PEI HSIEN; DERE, DANIEL J.; LIU, JENN; HUANG, JIH-CHUANG; LUCERO, ANTONIO; PINKHAM, SCOTT; OLTROGGE, STEVEN; MIDDLEBUSHER, DUANE
	2005-12-22
专利权人	ELECTRO SCIENTIFIC INDUSTRIES, INC.
公开日期	2005-12-22
授权国家	美国
专利类型	发明申请
摘要	A process and system scribe sapphire substrates, by performing the steps of mounting a sapphire substrate, carrying an array of integrated device die, on a stage such as a movable X-Y stage including a vacuum chuck; and directing UV pulses of laser energy directed at a surface of the sapphire substrate using a solid state laser and locating edges of the substrate. The cutting is stopped based on the edge location, to prevent impacting background elements. The pulses of laser energy have a wavelength below about 560 nanometers, and preferably between about 150 in 560 nanometers. In addition, energy density, spot size, and pulse duration are established at levels sufficient to induce ablation of sapphire.
其他摘要	一种工艺和系统划线蓝宝石衬底，通过在诸如包括真空吸盘的可移动X-Y平台的平台上执行安装蓝宝石衬底，承载集成器件管芯阵列的步骤;并且使用固态激光引导指向蓝宝石衬底表面的激光能量的UV脉冲并定位衬底的边缘。基于边缘位置停止切割，以防止影响背景元素。激光能量脉冲的波长低于约560纳米，优选约为560纳米。此外，能量密度，光斑尺寸和脉冲持续时间建立在足以诱导蓝宝石烧蚀的水平。
主权项	A method for manufacturing die from a sapphire substrate, comprising: producing a laser beam having a wavelength below about 560 nanometers; coupling the laser beam into a surface of a sapphire substrate by absorption sufficient to induce ablation of the sapphire substrate; moving the laser beam relative to the sapphire substrate to create via the ablation a scribe line in the substrate surface; detecting an edge of the substrate surface; and ceasing the creation of the scribe line before the laser beam crosses beyond the edge of the substrate surface in response to the detection of the substrate surface edge.
申请日期	2005-07-28
专利号	US20050279740A1
专利状态	失效
申请号	US11/191386
公开（公告）号	US20050279740A1
IPC 分类号	B23K26/03 \| B23K26/08 \| B23K26/38 \| B23K101/40 \| B28D5/00 \| H01L21/324 \| H01L21/477 \| H01L21/78 \| H01L33/00 \| H01S3/00 \| H01S5/02 \| H01S5/323
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/61250
专题	半导体激光器专利数据库
作者单位	ELECTRO SCIENTIFIC INDUSTRIES, INC.
推荐引用方式 GB/T 7714	LIU, KUO-CHING,FANG, PEI HSIEN,DERE, DANIEL J.,et al. Scribing sapphire substrates with a solid state UV laser with edge detection. US20050279740A1[P]. 2005-12-22.