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Vertical cavity surface emitting laser (VCSEL) device with improved reliability
其他题名Vertical cavity surface emitting laser (VCSEL) device with improved reliability
WEIGL, ALEXANDER
2019-06-05
专利权人KONINKLIJKE PHILIPS N.V.
公开日期2019-06-05
授权国家欧洲专利局
专利类型发明申请
摘要The invention describes a Vertical Cavity Surface Emitting Laser device (100) comprising at least one first optical resonator, a first electrode (210) and a second electrode (220), wherein the first electrode (210) and the second electrode (220) are arranged to electrically pump the first optical resonator during operation of the Vertical Cavity Surface Emitting Laser device (100), wherein the first electrode (210) or the second electrode (220) comprises at least one electrically conducting layer (132), wherein the electrically conducting layer (132) is arranged around an extended area comprising a first light emission area (20) of the first optical resonator and at least one extension area (40) such that the extended area is bigger than the first light emission area (20). The Vertical Cavity Surface Emitting Laser device (100) may be integrated in a Vertical Cavity Surface Emitting Laser module or in an optical sensor (300). The optical sensor may be integrated in a mobile communication device (400). The invention further relates to a method of manufacturing such a Vertical Cavity Surface Emitting Laser device (100) and a metallization lift off mask 10 which may be used in such a method of manufacturing.
其他摘要本发明描述了一种垂直腔面发射激光器件(100),包括至少一个第一光学谐振器,第一电极(210)和第二电极(220),其中第一电极(210)和第二电极(220)是在垂直腔面发射激光器装置(100)的操作期间,其被布置成电泵浦第一光学谐振器,其中第一电极(210)或第二电极(220)包括至少一个导电层(132),其中电气导电层(132)围绕延伸区域布置,该延伸区域包括第一光学谐振器的第一发光区域(20)和至少一个延伸区域(40),使得延伸区域大于第一发光区域(20) 。垂直腔面发射激光器装置(100)可以集成在垂直腔面发射激光器模块或光学传感器(300)中。光学传感器可以集成在移动通信设备(400)中。本发明还涉及制造这种垂直腔面发射激光器件(100)的方法和可用于这种制造方法的金属化剥离掩模10。
主权项A Vertical Cavity Surface Emitting Laser device (100) comprising at least one first optical resonator, a first electrode (210) and a second electrode (220), wherein the first electrode (210) and the second electrode (220) are arranged to electrically pump the first optical resonator during operation of the Vertical Cavity Surface Emitting Laser device (100), wherein the first electrode (210) or the second electrode (220) comprises at least one electrically conducting layer (132), wherein the electrically conducting layer (132) is arranged around an extended area comprising a first light emission area (20) of the first optical resonator and at least one extension area (40) such that the extended area is bigger than the first light emission area (20).
申请日期2017-11-30
专利号EP3493337A1
专利状态申请中
申请号EP2017204632
公开(公告)号EP3493337A1
IPC 分类号H01S5/022 | H01S5/042 | H01S5/183 | H01S5/42
专利代理人-
代理机构DE HAAN, POUL ERIK
文献类型专利
条目标识符http://ir.opt.ac.cn/handle/181661/55275
专题半导体激光器专利数据库
作者单位KONINKLIJKE PHILIPS N.V.
推荐引用方式
GB/T 7714
WEIGL, ALEXANDER. Vertical cavity surface emitting laser (VCSEL) device with improved reliability. EP3493337A1[P]. 2019-06-05.
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