Method and apparatus for controlling the size of a laser beam focal spot

OPT OpenIR > 半导体激光器专利数据库

	Method and apparatus for controlling the size of a laser beam focal spot
其他题名	Method and apparatus for controlling the size of a laser beam focal spot
	MILNE, DAVID, CHARLES
	2009-12-10
专利权人	M-SOLV LIMITED
公开日期	2009-12-10
授权国家	世界知识产权组织
专利类型	发明申请
摘要	A method and apparatus is described that allows the width of fine line structures ablated or cured by a focussed laser beam on the surface of flat substrates to be dynamically changed while the beam is in motion over the substrate surface while simultaneously maintaining the beam focal point accurately on the surface. A three-component variable optical telescope is used to independently control the beam diameter and collimation by movement of first and second optical components relative to the third optical component. The method allows different focal spot diameters and different ablated or cured line widths to be rapidly selected and ensures that the beam shape in the focal spot remains constant and the depth of focus is always maximized.
其他摘要	描述了一种方法和设备，其允许在光束在基板表面上运动的同时动态地改变由平坦基板表面上的聚焦激光束烧蚀或固化的细线结构的宽度，同时准确地保持光束焦点在表面上。三分量可变光学望远镜用于通过第一和第二光学部件相对于第三光学部件的移动来独立地控制光束直径和准直。该方法允许快速选择不同的焦斑直径和不同的烧蚀或固化的线宽，并确保焦斑中的光束形状保持恒定并且焦深始终最大化。
主权项	Apparatus for controlling the size of a laser beam focal spot formed on a substrate comprising: a. a laser unit; b. a variable optical telescope unit for independently changing the diameter and collimation of a laser beam received from the laser unit and comprising at least first, second and third optical components, the first and second optical components being movable relative to the third optical component so as to independently vary the distance between the third optical component and the first and second optical components; c. a focussing lens for bringing the laser beam received from the variable optical telescope unit to a focus on the surface of a substrate; d. a distance sensor for measuring the distance between the focussing lens and the surface of the substrate; and e. a control system for controlling the movement of said first and second optical components in dependence upon an output of the distance sensor to independently vary the diameter and collimation of the laser beam received by the focussing lens whereby the diameter of the focus formed by the focussing lens can be controlled and its axial position (along the optic axis) can also be controlled so the focal spot is maintained on the surface of the substrate.
申请日期	2009-05-29
专利号	WO2009147371A3
专利状态	未确认
申请号	PCT/GB2009/001332
公开（公告）号	WO2009147371A3
IPC 分类号	G02B27/09 \| B23K26/00
专利代理人	UNWIN, STEPHEN, GEOFFREY
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/54083
专题	半导体激光器专利数据库
作者单位	M-SOLV LIMITED
推荐引用方式 GB/T 7714	MILNE, DAVID, CHARLES. Method and apparatus for controlling the size of a laser beam focal spot. WO2009147371A3[P]. 2009-12-10.

条目包含的文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
WO2009147371A3.PDF（153KB）	专利		开放获取	CC BY-NC-SA	请求全文