Semiconductor optical devices and methods of making them

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	Semiconductor optical devices and methods of making them
其他题名	Semiconductor optical devices and methods of making them
	ROGERS, DAVID CARNEGIE; MOODIE, DAVID GRAHAM; LEALMAN, IAN FRANCIS; PERRIN, SIMON DAVID
	2003-05-22
专利权人	CORNING INCORPORATED
公开日期	2003-05-22
授权国家	美国
专利类型	发明申请
摘要	An optical monomode guided-wave device, especially an electroabsorption modulator, having an active region with a mode size small compared with that of an optical fibre is integrated with at least one passive spot size adjuster which has an optical core that tapers simultaneously from a width and height substantially equal to those of the active region adjacent to that region to a width large compared with the width of the active region and a thickness substantially smaller than the thickness of the active region at a position remote from that region. Usually-unless the device includes its own light source-there will be two spot size adjusters, respectively at the inlet and outlet of the device. The device is a buried hetero-structure device; its optical core tapers smoothly in both width and height; the dimensions of the core are such that there is an optical transmission mode for which the effective refractive index difference between the mode and any other mode (including the radiation field) is large enough to ensure that no more than 20% (preferably 5%) of light entering one end of the guided wave device in that mode will be lost by scattering or coupling; and the mode size at the distal end of the spot-size adjuster is substantially larger than its mode size in the active region. The simultaneous smooth tapers can be obtained by taking advantage of the characteristics of the mass-transport limited MOVPE technique, depositing in a narrow channel defined between two deposit-resist bands, the thickness deposited, at least in the centre of the channel, varying in a direct sense with the widths of the adjacent bands and in an inverse sense with the width of the channel.
其他摘要	光学单模导波器件，尤其是电吸收调制器，具有模数尺寸小于光纤的有源区域，与至少一个无源光斑尺寸调节器集成，该调光器具有从宽度同时逐渐变细的光学芯和高度基本上等于与该区域相邻的有源区域的高度，其宽度与有源区域的宽度相比较大，并且厚度远小于远离该区域的有源区域的厚度。通常 - 除非设备包括其自己的光源 - 在设备的入口和出口处将分别有两个光斑尺寸调节器。该器件是埋入式异质结构器件;它的光学纤芯在宽度和高度上均可逐渐变细;核心的尺寸就是这样有一种光传输模式，模式和任何其他模式（包括辐射场）之间的有效折射率差足够大，以确保不超过20％（最好是5％）的光进入光纤的一端。该模式下的导波装置会因散射或耦合而丢失;并且，光斑尺寸调节器的远端处的模式尺寸基本上大于其在有源区域中的模式尺寸。通过利用质量传递有限的MOVPE技术的特性，可以获得同时平滑的锥度，沉积在两个沉积 - 抗蚀剂带之间限定的窄通道中，沉积的厚度，至少在通道的中心，在直接感知相邻带的宽度，并且与宽度相反渠道。
主权项	1 An optical monomode guided-wave buried-heterostructure device having an active region with a mode size small compared with that of an optical fibre integrated with at least one passive spot size adjuster which has an optical core that tapers simultaneously and smoothly in both width and height from a width and height substantially equal to those of the active region adjacent to that region to a width large compared with the width of the active region and a thickness substantially smaller than the thickness of the active region at a position remote from that region such that the mode size at the distal end of the spot-size adjuster is substantially larger than its mode size in the active region and in which the dimensions of the core are such that there is an optical transmission mode for which the effective refractive index difference between the mode and any other mode is large enough to ensure that no more than 20% of light entering one end of the spot size adjuster in that mode is lost by scattering or coupling.
申请日期	2002-11-15
专利号	US20030095751A1
专利状态	失效
申请号	US10/295282
公开（公告）号	US20030095751A1
IPC 分类号	G02B6/122 \| G02B6/132 \| G02F1/025 \| H01S5/026 \| H01S5/12 \| H01S5/227 \| G02B6/26 \| G02B6/10 \| G02F1/035
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/52910
专题	半导体激光器专利数据库
作者单位	CORNING INCORPORATED
推荐引用方式 GB/T 7714	ROGERS, DAVID CARNEGIE,MOODIE, DAVID GRAHAM,LEALMAN, IAN FRANCIS,et al. Semiconductor optical devices and methods of making them. US20030095751A1[P]. 2003-05-22.