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Coupling a semiconducter laser to an optical waveguide
其他题名Coupling a semiconducter laser to an optical waveguide
HUGHES JOHN; PARSONS, NICHOLAS, MULBERRY, COTTAGE, BIRCH, ROAD, LAYER, DE, LA, HAYE, COLCHESTE; WOOD STEPHEN; FLINT IAN; JERRAM PAUL; PARSONS NICHOLAS
2003-10-16
专利权人BOOKHAM TECHNOLOGY PLC
公开日期2003-10-16
授权国家世界知识产权组织
专利类型发明申请
摘要A waveguide (10) is formed by using a single mask to define waveguide features and alignment features on the core layer (16). Etch stop is retained on the alignment features when the cladding layer (18) is added and a second mask defined which defines a mechanical stop and a waveguide facet aligned to the stop. The mask area is etched down to the substrate apart from the protected alignment features. Laser and other components can be attached. Lasers (65) may be attached by solder bumps (76) and have their own alignment feature spaced from the laser facet.
其他摘要通过使用单个掩模形成波导(10)以在芯层(16)上限定波导特征和对准特征。当添加包层(18)时,蚀刻停止保持在对准特征上,并且限定第二掩模,其限定机械止挡和与止挡对准的波导面。除了受保护的对准特征之外,掩模区域被向下蚀刻到衬底。可以连接激光和其他组件。激光器(65)可以通过焊料凸块(76)附接并且具有与激光器面分开的它们自己的对准特征。
主权项A method of fabricating a waveguide having a core layer deposited on a buffer layer arranged on a substrate, comprising forming a masking layer defining the waveguide and at least one component alignment feature, for aligning a component with the waveguide, on the core layer.
申请日期2002-10-17
专利号WO2003034115A3
专利状态未确认
申请号PCT/GB2002/004692
公开(公告)号WO2003034115A3
IPC 分类号G02B6/36 | G02B6/42 | G02B6/30 | G02B6/122 | G02B6/136
专利代理人DOWNING, MICHAEL, PHILIP, ET AL, FRY HEATH & SPENCE LLP, THE GABLES, MASSETTS ROAD, HORLEY, SURREY RH6 7DQ, GB
代理机构-
文献类型专利
条目标识符http://ir.opt.ac.cn/handle/181661/52888
专题半导体激光器专利数据库
作者单位BOOKHAM TECHNOLOGY PLC
推荐引用方式
GB/T 7714
HUGHES JOHN,PARSONS, NICHOLAS, MULBERRY, COTTAGE, BIRCH, ROAD, LAYER, DE, LA, HAYE, COLCHESTE,WOOD STEPHEN,et al. Coupling a semiconducter laser to an optical waveguide. WO2003034115A3[P]. 2003-10-16.
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