Xi'an Institute of Optics and Precision Mechanics,CAS
Coupling a semiconducter laser to an optical waveguide | |
其他题名 | Coupling a semiconducter laser to an optical waveguide |
HUGHES JOHN; PARSONS, NICHOLAS, MULBERRY, COTTAGE, BIRCH, ROAD, LAYER, DE, LA, HAYE, COLCHESTE; WOOD STEPHEN; FLINT IAN; JERRAM PAUL; PARSONS NICHOLAS | |
2003-10-16 | |
专利权人 | BOOKHAM TECHNOLOGY PLC |
公开日期 | 2003-10-16 |
授权国家 | 世界知识产权组织 |
专利类型 | 发明申请 |
摘要 | A waveguide (10) is formed by using a single mask to define waveguide features and alignment features on the core layer (16). Etch stop is retained on the alignment features when the cladding layer (18) is added and a second mask defined which defines a mechanical stop and a waveguide facet aligned to the stop. The mask area is etched down to the substrate apart from the protected alignment features. Laser and other components can be attached. Lasers (65) may be attached by solder bumps (76) and have their own alignment feature spaced from the laser facet. |
其他摘要 | 通过使用单个掩模形成波导(10)以在芯层(16)上限定波导特征和对准特征。当添加包层(18)时,蚀刻停止保持在对准特征上,并且限定第二掩模,其限定机械止挡和与止挡对准的波导面。除了受保护的对准特征之外,掩模区域被向下蚀刻到衬底。可以连接激光和其他组件。激光器(65)可以通过焊料凸块(76)附接并且具有与激光器面分开的它们自己的对准特征。 |
主权项 | A method of fabricating a waveguide having a core layer deposited on a buffer layer arranged on a substrate, comprising forming a masking layer defining the waveguide and at least one component alignment feature, for aligning a component with the waveguide, on the core layer. |
申请日期 | 2002-10-17 |
专利号 | WO2003034115A3 |
专利状态 | 未确认 |
申请号 | PCT/GB2002/004692 |
公开(公告)号 | WO2003034115A3 |
IPC 分类号 | G02B6/36 | G02B6/42 | G02B6/30 | G02B6/122 | G02B6/136 |
专利代理人 | DOWNING, MICHAEL, PHILIP, ET AL, FRY HEATH & SPENCE LLP, THE GABLES, MASSETTS ROAD, HORLEY, SURREY RH6 7DQ, GB |
代理机构 | - |
文献类型 | 专利 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/52888 |
专题 | 半导体激光器专利数据库 |
作者单位 | BOOKHAM TECHNOLOGY PLC |
推荐引用方式 GB/T 7714 | HUGHES JOHN,PARSONS, NICHOLAS, MULBERRY, COTTAGE, BIRCH, ROAD, LAYER, DE, LA, HAYE, COLCHESTE,WOOD STEPHEN,et al. Coupling a semiconducter laser to an optical waveguide. WO2003034115A3[P]. 2003-10-16. |
条目包含的文件 | ||||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
WO2003034115A3.PDF(179KB) | 专利 | 开放获取 | CC BY-NC-SA | 请求全文 |
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