Micromachined torsional mirror unit for optical switching and fabrication method therefor

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	Micromachined torsional mirror unit for optical switching and fabrication method therefor
其他题名	Micromachined torsional mirror unit for optical switching and fabrication method therefor
	DE ROOIJ, NICOLAAS F.; NOELL, WILFRIED; SHAN, XUECHUAN; WANG, ZHENFENG; WANG, ZHIPING
	2003-10-27
专利权人	SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY
公开日期	2003-10-27
授权国家	澳大利亚
专利类型	发明申请
摘要	An optical switch (402) formed on a substrate and a fabrication method therefor are disclosed. The optical switch (402) comprises a mirror (404) disposed substantially upright in relation to a substrate (414), the mirror (404) being rotatably displaceable about a pivot between a first position and a position angularly displaced from the first position. The optical switch also comprises a comb drive actuator, which includes a stationary comb (408) anchored to the substrate in a position substantially parallel to the plane of the substrate (414), and a displaceable comb (406) interleaved with the stationary comb (408) and coupled to the mirror (404) in a position substantially coplanar with the stationary comb (408) and substantially perpendicular to the plane of the mirror (404). In the optical switch (402), the stationary and displaceable combs (408, 406) are capable of applying a force for rotatably displacing the mirror (404) to one of the first position and position angularly displaced from the first position.
其他摘要	公开了一种形成在基板上的光学开关（402）及其制造方法。光学开关（402）包括相对于基板（414）基本竖直设置的镜子（404），镜子（404）可绕第一位置和从第一位置成角度地移位的位置之间的枢轴可旋转地移位。光学开关还包括梳状驱动致动器，其包括固定梳子（408），固定梳子（408）在基本平行于基板（414）的平面的位置固定到基板，以及与固定梳子交错的可移位梳子（406）（ 408）并且在与固定梳子（408）基本上共面并且基本垂直于镜子（404）的平面的位置处耦合到镜子（404）。在光学开关（402）中，固定和可移位的梳子（408,406）能够施加力以将镜子（404）可旋转地移动到第一位置和从第一位置角度地移位的位置中的一个。
主权项	An optical switch formed on a substrate, comprising: a mirror disposed substantially upright in relation to a substrate, the mirror being rotatably displaceable about a pivot between a first position and a position angularly displaced from the first position; and a comb drive actuator including a stationary comb anchored to the substrate in a position substantially parallel to the plane of the substrate, and a displaceable comb interleaved with the stationary comb and coupled to the mirror in a position substantially coplanar with the stationary comb and substantially perpendicular to the plane of the mirror wherein the stationary and displaceable combs are capable of applying a first force for rotatably displacing the mirror to one of the first position and position angularly displaced from the first position.
申请日期	2002-03-30
专利号	AU2002251666A1
专利状态	失效
申请号	AU2002251666
公开（公告）号	AU2002251666A1
IPC 分类号	B81B3/00 \| G02B6/35 \| G02B6/26
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/52688
专题	半导体激光器专利数据库
作者单位	SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY
推荐引用方式 GB/T 7714	DE ROOIJ, NICOLAAS F.,NOELL, WILFRIED,SHAN, XUECHUAN,et al. Micromachined torsional mirror unit for optical switching and fabrication method therefor. AU2002251666A1[P]. 2003-10-27.