Method for fabrication of vertically coupled integrated optical structures

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	Method for fabrication of vertically coupled integrated optical structures
其他题名	Method for fabrication of vertically coupled integrated optical structures
	HRYNIEWICZ, JOHN; ABSIL, PHILIPPE; LITTLE, BRENT; KING, OLIVER; HO, PING-TONG
	2002-02-07
专利权人	UNIVERSITY OF MARYLAND, COLLEGE PARK
公开日期	2002-02-07
授权国家	世界知识产权组织
专利类型	发明申请
摘要	A manufacturing process is provided for fabrication of vertically coupled integrated photonic devices by projection lithographic technique. A multi-layered structure (10) is formed which includes a pair of core waveguiding layers (14, 16) separated by a coupling interlayer (15) and sandwiched between cladding layers (13, 17). Prior to forming optical features in the core layers, alignment marks (18) are etched completely through the whole multi-layered structure with the alignment marks being visible on both sides of the multi-layered structure to a conventional projection stepper. After the alignment marks are formed, a "bottom level" optical features are made through the bottom cladding layer, bottom core layer, and portion of intervening coupling layer. The formed sample is then bonded by a polymer to a carrier and a "top level" optical features are defined through the top cladding, top core layer, and portion of the intervening coupling layer.
其他摘要	提供了一种制造工艺，用于通过投影光刻技术制造垂直耦合的集成光子器件。形成多层结构（10），其包括由耦合中间层（15）隔开并夹在包层（13,17）之间的一对芯波导层（14,16）。在芯层中形成光学特征之前，对准标记（18）完全蚀刻穿过整个多层结构，其中对准标记在多层结构的两侧可见到传统的投影步进器。在形成对准标记之后，通过底部包层，底部芯层和中间耦合层的一部分形成“底层”光学特征。然后通过聚合物将形成的样品粘合到载体上，并通过顶部包层，顶部芯层和插入的耦合层的一部分限定“顶层”光学特征。
主权项	A method for fabrication of vertically coupled integrated photonics devices, including the steps of: (a) forming a multi-layered structure having first and second levels and comprising: at least a first and a second waveguiding core layers , a coupling layer disposed between said at least first and second waveguiding core layers, and first and second cladding layers sandwiching said waveguiding core layers therebetween; (b) forming alignment marks extending substantially through said multi-layered structure at predetermined areas thereof, (c) forming first features at said first level of said multi-layered structure, said first features extending through said first cladding, said first waveguiding core layer and partially through said coupling layer; and (d) forming second features at said second level of said multi-layered structure, said second features extending through said second cladding, said second waveguiding core layer and partially through said coupling layer; whereby said first and second features are disposed at predetermined location with reference to said alignment marks identifiable at both said first and second levels of said multi-layered structure.
申请日期	2001-03-05
专利号	WO2002010814A1
专利状态	未确认
申请号	PCT/US2001/004943
公开（公告）号	WO2002010814A1
IPC 分类号	G02B6/12 \| G02B6/132 \| G02B6/13 \| G02B6/125 \| C23F1/00 \| G02B6/26 \| G02B6/10 \| G02B6/30
专利代理人	ROSENBERG, MORTON, J.
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/52376
专题	半导体激光器专利数据库
作者单位	UNIVERSITY OF MARYLAND, COLLEGE PARK
推荐引用方式 GB/T 7714	HRYNIEWICZ, JOHN,ABSIL, PHILIPPE,LITTLE, BRENT,et al. Method for fabrication of vertically coupled integrated optical structures. WO2002010814A1[P]. 2002-02-07.