Integrated optical micro-electromechanical systems and methods of fabricating and operating the same

OPT OpenIR > 半导体激光器专利数据库

	Integrated optical micro-electromechanical systems and methods of fabricating and operating the same
其他题名	Integrated optical micro-electromechanical systems and methods of fabricating and operating the same
	MIRACKY, ROBERT F.; REED, JASON D.; HU, KAI; HILBERT, CLAUDE
	2002-08-08
专利权人	TERAVICTA TECHNOLOGIES,INC.
公开日期	2002-08-08
授权国家	美国
专利类型	发明申请
摘要	An apparatus and method of fabricating and operating a micro-electromechanical systems (MEMS) integrated optical structure is disclosed. Micro-optics is integrated with MEMS actuators to provide a building block for a micro-optical communication device. Such micro-optical communication device may realize a variety of optical communication systems including optical interconnects, laser communications, or fiber optic switches. In accordance with one aspect of the present invention, a micro-optical element such as a micro-lens is advantageously integrated with an actuator such as MEMS comb drive actuator to form a MEMS lens assembly. The MEMS lens assembly is further coupled to an optical source which may provide a MEMS integrated micro-optical communication device. This integration substantially obviates the generally needed external or manual positioning of the micro-optical element to align a light beam or an optical signal being emitted from the optical source. The MEMS comb drive actuator, responsive to an actuation force, selectively positions the micro-optical element. By appropriately micro positioning a micro-optical element such as a micro-lens relative to an optical source, such as an input optical fiber or a laser diode, a focused light beam or an optical signal may be coupled to a respective optical fiber or a detector. In one embodiment, a commonly used flip chip module assembly technique may be adapted for bonding the MEMS lens assembly to a carrier substrate, which preferably receives the optical source. The carrier substrate is generally disposed on a host assembly. A flip chip based passive alignment of the MEMS lens assembly could be provided. Additionally, an active alignment of the light beam or optical signal with an optical detector may be provided, which can be maintained through a feedback loop.
其他摘要	公开了一种制造和操作微机电系统（MEMS）集成光学结构的装置和方法。微光学器件与MEMS致动器集成在一起，为微光通信设备提供构建块。这种微光通信设备可以实现各种光通信系统，包括光互连，激光通信或光纤开关。根据本发明的一个方面，诸如微透镜的微光学元件有利地与诸如MEMS梳状驱动致动器的致动器集成以形成MEMS透镜组件。 MEMS透镜组件还耦合到光源，该光源可以提供MEMS集成的微光通信设备。这种集成基本上消除了微光学元件通常需要的外部或手动定位，以对准光束或光束光信号从光源发出。响应于致动力的MEMS梳状驱动致动器选择性地定位微光学元件。通过相对于光源（例如输入光纤或激光二极管）适当地微定位诸如微透镜的微光学元件，聚焦光束或光信号可以耦合到相应的光纤或光纤。探测器。在一个实施例中，常用的倒装芯片模块组装技术可以适于将MEMS透镜组件结合到载体基板，该载体基板优选地接收光源。载体基板通常设置在主机组件上。可以提供基于倒装芯片的MEMS透镜组件的无源对准。另外，可以提供光束或光学信号与光学检测器的主动对准，其可以通过反馈来维持循环。
主权项	An integrated optical apparatus, comprising: a micro-electromechanical member; and a substantially transmissive micro-optical element coupled to the micro-electromechanical member.
申请日期	2001-02-02
专利号	US20020105699A1
专利状态	失效
申请号	US09/775867
公开（公告）号	US20020105699A1
IPC 分类号	G02B6/124 \| G02B6/32 \| G02B6/35 \| G02B6/42 \| G02B6/43 \| H01S5/00 \| H01S5/022 \| H01S5/14 \| H01S5/183 \| H04B10/04 \| G02B6/12 \| H04B10/00 \| H01S3/00 \| G02B13/14 \| H01S3/08 \| G02F1/29
专利代理人	-
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/52351
专题	半导体激光器专利数据库
作者单位	TERAVICTA TECHNOLOGIES,INC.
推荐引用方式 GB/T 7714	MIRACKY, ROBERT F.,REED, JASON D.,HU, KAI,et al. Integrated optical micro-electromechanical systems and methods of fabricating and operating the same. US20020105699A1[P]. 2002-08-08.