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Semiconductor laser having co-doped distributed bragg reflectors
其他题名Semiconductor laser having co-doped distributed bragg reflectors
DENG, HONGYU; WANG, XIAOZHONG; LEI, CHUN
2001-10-09
专利权人AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
公开日期2001-10-09
授权国家美国
专利类型授权发明
摘要This invention provides a semiconductor laser device, such as a Vertical Cavity Surface-Emitting Laser (VCSEL) device which includes a Distributed Bragg Reflector (DBR) made up of layers which are co-doped with different dopants. For instance, a p-type DBR produced by organometallic vapor-phase epitaxy (OMPVE) includes layers having, respectively, a low refractive index and a high refractive index, the layers being made, respectively, of high-Al AlGaAs and low-Al AlGaAs. According to the invention, C, by itself or in addition to Mg, is used as the dopant in the high-Al AlGaAs layers, and Mg is used in the low-Al AlGaAs layers. Because of this co-doping, the semiconductor laser device achieves low series resistance and operating voltage, with good manufacturability.
其他摘要本发明提供一种半导体激光器件,例如垂直腔面发射激光器(VCSEL)器件,其包括由共掺杂有不同掺杂剂的层构成的分布式布拉格反射器(DBR)。例如,由有机金属气相外延(OMPVE)产生的p型DBR包括分别具有低折射率和高折射率的层,这些层分别由高Al AlGaAs和低Al制成。的AlGaAs。根据本发明,C本身或除Mg之外用作高Al AlGaAs层中的掺杂剂,Mg用于低Al AlGaAs层。由于这种共掺杂,半导体激光器件实现了低串联电阻和工作电压,并具有良好的可制造性。
主权项A semiconductor laser device comprising: an active layer having opposing sides; a first reflective structure disposed on one side of the active layer, the first reflective structure including, a first layer, having a first index of refraction, being made of a first semiconductor compound including a first dopant, and a second layer, having a second index of refraction, being made of a second semiconductor compound including a second dopant, the second dopant being different from the first dopant; and a second reflective structure disposed on the side of the active layer opposite to one side, the second reflective structure including, a first layer, having a first index of refraction and being made of a first semiconductor compound including a first dopant, and a second layer, having a second index of refraction and being made of a second semiconductor compound including a second dopant, the second dopant being different from the first dopant.
申请日期1998-08-31
专利号US6301281
专利状态失效
申请号US09/144355
公开(公告)号US6301281
IPC 分类号H01S5/30 | H01S5/183 | H01S5/00 | H01S3/08
专利代理人-
代理机构-
文献类型专利
条目标识符http://ir.opt.ac.cn/handle/181661/46362
专题半导体激光器专利数据库
作者单位AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.
推荐引用方式
GB/T 7714
DENG, HONGYU,WANG, XIAOZHONG,LEI, CHUN. Semiconductor laser having co-doped distributed bragg reflectors. US6301281[P]. 2001-10-09.
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