Single mode reflector using a nanobeam cavity

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	Single mode reflector using a nanobeam cavity
其他题名	Single mode reflector using a nanobeam cavity
	LIN, SHIYUN; ZHENG, XUEZHE; LUO, YING; KRISHNAMOORTHY, ASHOK V.
	2017-05-09
专利权人	ORACLE INTERNATIONAL CORPORATION
公开日期	2017-05-09
授权国家	美国
专利类型	授权发明
摘要	An integrated circuit includes an optical reflector with one or two bus optical waveguides and a one-dimensional, photonic crystal nanobeam cavity to provide single-mode reflection with a narrow bandwidth. In particular, the nanobeam cavity may be implemented on a nanobeam-cavity optical waveguide (such as a channel or ridge optical waveguide), which is optically coupled to the one or two bus optical waveguides. The nanobeam-cavity optical waveguide may include notches along a symmetry axis of the nanobeam-cavity optical waveguide that are partially etched from edges of the nanobeam-cavity optical waveguide toward a center of the nanobeam-cavity optical waveguide. Furthermore, a fill factor of the notches may vary as a function of location along the symmetry axis, while a pitch of the notches is unchanged, to define the nanobeam cavity.
其他摘要	集成电路包括具有一个或两个总线光波导的光学反射器和一维光子晶体纳米束腔，以提供具有窄带宽的单模反射。特别地，纳米束腔可以在纳米束腔 - 腔光波导（例如通道或脊光波导）上实现，其光学耦合到一个或两个总线光波导。纳米束腔 - 腔光波导可以包括沿纳米束腔 - 腔光波导的对称轴的凹口，其从纳米束腔 - 腔光波导的边缘朝向纳米束腔 - 腔光波导的中心部分地蚀刻。此外，凹口的填充因子可以根据沿对称轴的位置而变化，而凹口的间距不变，以限定纳米束腔。
主权项	An integrated circuit, comprising: a substrate; a buried-oxide (BOX) layer disposed on the substrate; anda semiconductor layer disposed on the BOX layer, wherein the semiconductor layer includes an optical reflector, and wherein the optical reflector includes:a first bus optical waveguide; and a nanobeam-cavity optical waveguide optically coupled to the first bus optical waveguide, wherein the nanobeam-cavity optical waveguide includes notches along a symmetry axis of the nanobeam-cavity optical waveguide that are partially etched from edges of the nanobeam-cavity optical waveguide toward a center of the nanobeam-cavity optical waveguide; and wherein a fill factor of the notches varies as a function of location along the symmetry axis, while a pitch of the notches is unchanged, to define a nanobeam cavity.
申请日期	2015-10-13
专利号	US9647424
专利状态	授权
申请号	US14/881741
公开（公告）号	US9647424
IPC 分类号	H01S5/00 \| G02B6/122 \| G02B6/125 \| G02B6/136 \| G02B6/12 \| G02B6/293 \| G02B6/10 \| H01S5/20 \| H01S5/14 \| H01S5/40 \| H01S5/10 \| H01S5/026 \| H01S5/223 \| H01S5/12
专利代理人	-
代理机构	PARK, VAUGHAN, FLEMING & DOWLER LLP
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/46308
专题	半导体激光器专利数据库
作者单位	ORACLE INTERNATIONAL CORPORATION
推荐引用方式 GB/T 7714	LIN, SHIYUN,ZHENG, XUEZHE,LUO, YING,et al. Single mode reflector using a nanobeam cavity. US9647424[P]. 2017-05-09.

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