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Hybrid MOPA having narrowband oscillator and amplifier with integrated optical coupling
其他题名Hybrid MOPA having narrowband oscillator and amplifier with integrated optical coupling
O'DANIEL, JASON KIRK; JOHNSON, ERIC GORDAN; SMOLSKI, OLEG; SRINIVASAN, PRADEEP
2008-06-17
专利权人JOHNSON, ERIC G.
公开日期2008-06-17
授权国家美国
专利类型授权发明
摘要A waveguide to waveguide coupled hybrid master oscillator power amplifier (MOPA) includes a wavelength locked laser master oscillator (MO) first chip including a semiconductor substrate, a waveguide region having a gain section, one side of the MO including an integrated wavelength selective feedback element and the other side of the MO including an integrated reflective or coupling element on one side the waveguide and an emitting surface opposite the integrated reflective or coupling element for emitting light. A power amplifier (PA) second chip is stacked above or below the MO. The PA includes a semiconductor substrate including a waveguide region having a gain section, an integrated reflective or coupling element on a side of the PA aligned with light emitted from the emitting surface of the MO and a coupling grating or turning mirror and integrated lens on an opposite side of the PA for emitting an output beam.
其他摘要波导耦合波导耦合混合主振荡器功率放大器(MOPA)包括波长锁定激光主振荡器(MO)第一芯片,其包括半导体衬底,波导区域具有增益部分,MO的一侧包括集成波长选择反馈元件MO的另一侧包括在波导的一侧上的集成反射或耦合元件以及与用于发射光的集成反射或耦合元件相对的发射表面。功率放大器(PA)第二芯片堆叠在MO的上方或下方。 PA包括半导体衬底,该半导体衬底包括具有增益部分的波导区域,在PA的一侧上的集成反射或耦合元件,其与从MO的发射表面发射的光对准,以及耦合光栅或转向镜和集成透镜。用于发射输出光束的PA的相对侧。
主权项A waveguide to waveguide coupled hybrid master oscillator power amplifier (MOPA), comprising: a wavelength locked laser master oscillator (MO) first chip comprising a semiconductor substrate including a waveguide region having a gain section, one side of said MO including an integrated wavelength selective feedback element and the other side of said MO including an integrated reflective or coupling element on one side said waveguide and an emitting surface opposite said integrated reflective or coupling element for emitting light; a power amplifier (PA) second chip stacked above or below said MO comprising a semiconductor substrate including a waveguide region having a gain section, said PA including an integrated reflective or coupling element on a side of said PA aligned with light emitted from said emitting surface and a coupling grating or turning mirror and integrated lens on an opposite side of said PA for emitting an output beam.
申请日期2006-09-06
专利号US7388894
专利状态失效
申请号US11/516247
公开(公告)号US7388894
IPC 分类号H01S5/00
专利代理人-
代理机构DARBY & DARBY PC
文献类型专利
条目标识符http://ir.opt.ac.cn/handle/181661/46130
专题半导体激光器专利数据库
作者单位JOHNSON, ERIC G.
推荐引用方式
GB/T 7714
O'DANIEL, JASON KIRK,JOHNSON, ERIC GORDAN,SMOLSKI, OLEG,et al. Hybrid MOPA having narrowband oscillator and amplifier with integrated optical coupling. US7388894[P]. 2008-06-17.
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