Isolation of passive devices and integration with active devices in optical waveguiding circuits

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	Isolation of passive devices and integration with active devices in optical waveguiding circuits
其他题名	Isolation of passive devices and integration with active devices in optical waveguiding circuits
	TIEN, PING KING
	1976-04-06
专利权人	BELL TELEPHONE LABORATORIES, INCORPORATED
公开日期	1976-04-06
授权国家	美国
专利类型	授权发明
摘要	The comprehensive large scale integration of thin-film optical circuits is made possible by a series of related developments. The key concept is the isolation of the high index substrate, necessary to active devices, wherever it is desired to have a passive device, by the interposition of an oxide layer such as SiO2. It is preferred that the passive devices and the SiO2 by amorphous. This new arrangement allows the use of discrete thin-film corner reflectors, instead of distributed feedback, in resonant active devices and wherever a reflector or beam-splitter is needed. Further, the active devices may be located photolithographically by etching windows in the SiO2 layer. All of the active devices share a common active layer, which forms the passive devices wherever it extends between windows and simultaneously is the light guiding layer throughout.
其他摘要	通过一系列相关的发展，可以实现薄膜光学电路的全面大规模集成。关键概念是通过插入诸如SiO 2的氧化物层来隔离有源器件所需的高折射率衬底，无论何处需要具有无源器件。优选的是，无源器件和SiO2通过非晶态。这种新的布置允许在谐振有源器件中以及需要反射器或分束器的任何地方使用分立的薄膜角反射器而不是分布式反馈。此外，可以通过蚀刻SiO 2层中的窗口来光刻地定位有源器件。所有有源器件共享一个公共有源层，无论何时在窗口之间延伸，它都形成无源器件，同时始终是光引导层。
主权项	An optical circuit comprising a substrate having a first index of refraction, an isolating layer disposed on said substrate and composed of material of much lower index of refraction than said first index, at least one passive optical device formed over said isolating layer, and at least one active optical device coupled with said passive optical device and formed at least in part in an aperture through said isolating layer, said active device including in a position under the aperture a substrate portion, the active and passive devices having the same potentially active waveguiding layer for a first frequency in common, said active optical device including means separate from said passive device for lower-frequency signal coupling with both the substrate portion and common layer portion of said active device.
申请日期	1974-12-09
专利号	US3948583
专利状态	失效
申请号	US05/531207
公开（公告）号	US3948583
IPC 分类号	G02B6/12 \| H01S5/00 \| H01S5/16 \| H01L33/00 \| H01S5/10 \| H01S5/026 \| H01S5/20 \| G02B5/14
专利代理人	-
代理机构	WISNER, WILFORD L.
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/46113
专题	半导体激光器专利数据库
作者单位	BELL TELEPHONE LABORATORIES, INCORPORATED
推荐引用方式 GB/T 7714	TIEN, PING KING. Isolation of passive devices and integration with active devices in optical waveguiding circuits. US3948583[P]. 1976-04-06.

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