Method of characterizing optical parameters of opto-electronic components and apparatus for carrying out the method, particularly during a coating operation

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	Method of characterizing optical parameters of opto-electronic components and apparatus for carrying out the method, particularly during a coating operation
其他题名	Method of characterizing optical parameters of opto-electronic components and apparatus for carrying out the method, particularly during a coating operation
	IDLER, WILFRIED
	1993-10-12
专利权人	ALCATEL N.V.
公开日期	1993-10-12
授权国家	美国
专利类型	授权发明
摘要	In the commonly used methods for the coating of opto-electronic components, especially of semiconductor lasers, the layer thickness of a layer that is to be deposited is measured optically. The optical signal is converted into an electrical one with which the coating is controlled. The invention relates to the purely electrical interpretation of the high frequency component of the electrical noise power of an opto-electronic component (3) when a direct current passes through it. From the noise power, a controlling computer (10) derives a signal for control of the layer thickness; this is fed into a coating apparatus (14) of a coating reactor (2) which has a reacting chamber (1) containing the component (3) to be coated.
其他摘要	在常用的涂覆光电元件，特别是半导体激光器的方法中，光学测量待沉积层的层厚度。光信号被转换成电信号，用于控制涂层。本发明涉及当直流电流通过光电元件（3）时电光噪声功率的高频分量的纯电气解释。根据噪声功率，控制计算机（10）导出用于控制层厚度的信号;将其加入涂覆反应器（2）的涂覆装置（14）中，涂覆反应器（2）具有包含待涂覆的组分（3）的反应室（1）。
主权项	Method of coating an optoelectronic component having terminals with a dielectric layer, comprising the steps: supplying a direct current through the terminals to the component during the coating process, determining an electrical parameter of an electrical noise spectrum which is superimposed on the direct current by the component, feeding the electrical parameter to a control computer for deriving a control signal corresponding to an optical parameter of the device, and coating the component with a dielectric layer whose thickness is controlled by the control signal.
申请日期	1991-08-01
专利号	US5252497
专利状态	失效
申请号	US07/739803
公开（公告）号	US5252497
IPC 分类号	G01R29/00 \| G01R29/26 \| H01S5/022 \| H01S5/00 \| H01S5/18 \| H01L21/66 \| H01S5/028
专利代理人	-
代理机构	ROBBINS,BERLINER & CARSON
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/46058
专题	半导体激光器专利数据库
作者单位	ALCATEL N.V.
推荐引用方式 GB/T 7714	IDLER, WILFRIED. Method of characterizing optical parameters of opto-electronic components and apparatus for carrying out the method, particularly during a coating operation. US5252497[P]. 1993-10-12.

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