Vertical cavity surface emitting laser semiconductor chip with integrated drivers and photodetectors and method of fabrication

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	Vertical cavity surface emitting laser semiconductor chip with integrated drivers and photodetectors and method of fabrication
其他题名	Vertical cavity surface emitting laser semiconductor chip with integrated drivers and photodetectors and method of fabrication
	HUANG, RONG-TING; SHIEH, CHAN-LONG; LEBBY, MICHAEL S.
	2000-08-01
专利权人	SEIKO EPSON CORPORATION
公开日期	2000-08-01
授权国家	美国
专利类型	授权发明
摘要	A vertical cavity surface emitting laser semiconductor chip including a vertical cavity surface emitting laser (VCSEL) formed on a substrate, a photodetector, integrated with the vertical cavity surface emitting laser for automatic power control (APC) of the vertical cavity surface emitting laser and a driver circuit, integrated with the vertical cavity surface emitting laser and the photodetector. The VCSEL, photodetector and driver circuit are integrated by utilizing a monolithic polysilicon layer. The driver circuit is characterized as a CMOS driver circuit, capable of receiving feedback from the photodetector and adjusting the output power of the vertical cavity surface emitting laser in response to the feedback, thus achieving APC of the VCSEL.
其他摘要	一种垂直腔表面发射激光器半导体芯片，包括形成在基板上的垂直腔表面发射激光器（VCSEL），光电探测器，与垂直腔表面发射激光器集成，用于垂直腔表面发射激光器的自动功率控制（APC）和驱动电路，与垂直腔表面发射激光器和光电探测器集成。 VCSEL，光电探测器和驱动电路通过利用单片多晶硅层集成。驱动电路的特征在于CMOS驱动电路，能够接收来自光电探测器的反馈并响应反馈调整垂直腔表面发射激光器的输出功率，从而实现VCSEL的APC。
主权项	A vertical cavity surface emitting laser semiconductor chip comprising: a vertical cavity surface emitting laser formed on a substrate; a photodetector, integrated with the vertical cavity surface emitting laser for automatic power control of the vertical cavity surface emitting laser; and a laterally integrated driver circuit, formed on the substrate, and about a periphery of the substrate, the driver circuit characterized as receiving feedback from the photodetector and adjusting an output power of the vertical cavity surface emitting laser in response to the feedback.
申请日期	1998-05-18
专利号	US6097748
专利状态	失效
申请号	US09/080152
公开（公告）号	US6097748
IPC 分类号	H01S5/00 \| H01S5/026 \| H01S5/183 \| H01S3/19
专利代理人	-
代理机构	PARSONS, EUGENE A. KOCH, WILLIAM E.
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/45391
专题	半导体激光器专利数据库
作者单位	SEIKO EPSON CORPORATION
推荐引用方式 GB/T 7714	HUANG, RONG-TING,SHIEH, CHAN-LONG,LEBBY, MICHAEL S.. Vertical cavity surface emitting laser semiconductor chip with integrated drivers and photodetectors and method of fabrication. US6097748[P]. 2000-08-01.

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