Method of manufacturing frequency tunable terahertz transceiver

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	Method of manufacturing frequency tunable terahertz transceiver
其他题名	Method of manufacturing frequency tunable terahertz transceiver
	PARK, KYUNG, HYUN
	2016-01-12
专利权人	ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
公开日期	2016-01-12
授权国家	美国
专利类型	授权发明
摘要	A method of manufacturing a frequency tunable terahertz transceiver including two separate distributed feedback lasers manufactured in one substrate, includes forming a lower clad layer on the substrate, forming an active layer on the lower clad layer, forming an upper clad layer on the active layer. And interposing first and second diffraction grating layers between the upper clad layers. A diffraction grating is manufactured by etching the first and second diffraction grating layers. The active layer is integrated into a passive waveguide. An electrode is formed on the upper clad layer.
其他摘要	一种制造包括在一个衬底中制造的两个单独的分布式反馈激光器的频率可调谐太赫兹收发器的方法，包括在衬底上形成下包层，在下包层上形成有源层，在有源层上形成上包层。以及在上包覆层之间插入第一和第二衍射光栅层。通过蚀刻第一和第二衍射光栅层来制造衍射光栅。有源层集成到无源波导中。在上覆层上形成电极。
授权日期	2016-01-12
申请日期	2014-02-10
专利号	US9236711
专利状态	授权
申请号	US14/176838
公开（公告）号	US9236711
IPC 分类号	H01S5/10 \| G02F1/35 \| H01S5/625 \| H01S5/12 \| H01S5/06 \| H01S5/42 \| H01S5/26 \| H01S5/40 \| H01S5/00 \| H01S5/026 \| H01S5/042 \| H01S5/0625
专利代理人	-
代理机构	RABIN & BERDO, P.C.
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/42104
专题	半导体激光器专利数据库
作者单位	ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
推荐引用方式 GB/T 7714	PARK, KYUNG, HYUN. Method of manufacturing frequency tunable terahertz transceiver. US9236711[P]. 2016-01-12.