Xi'an Institute of Optics and Precision Mechanics,CAS
Semitransparent optical detector on a flexible substrate and method of making | |
其他题名 | Semitransparent optical detector on a flexible substrate and method of making |
WAGNER, SIGURD; WAGNER, MATTHIAS; MA, EUGENE Y.; PAYNE, ADAM M. | |
2003-12-30 | |
专利权人 | II-VI PHOTONICS, (US) INC. |
公开日期 | 2003-12-30 |
授权国家 | 美国 |
专利类型 | 授权发明 |
摘要 | Materials suitable for fabricating optical monitors include amorphous, polycrystalline and microcrystalline materials. Semitransparent photodetector materials may be based on silicon or silicon and germanium alloys. Conductors for connecting to and contacting the photodetector may be made from various transparent oxides, including zinc oxide, tin oxide and indium tin oxide. Optical monitor structures based on PIN diodes take advantage of the materials disclosed. Various contact, lineout, substrate and interconnect structures optimize the monitors for integration with various light sources, including vertical cavity surface emitting laser (VCSEL) arrays. Complete integrated structures include a light source, optical monitor and either a package or waveguide into which light is directed. |
其他摘要 | 适用于制造光学监视器的材料包括非晶,多晶和微晶材料。半透明光电探测器材料可以基于硅或硅和锗合金。用于连接和接触光电探测器的导体可以由各种透明氧化物制成,包括氧化锌,氧化锡和氧化铟锡。基于PIN二极管的光学监视器结构利用了所公开的材料。各种接触,线路,基板和互连结构优化了监视器,以与各种光源集成,包括垂直腔表面发射激光器(VCSEL)阵列。完整的集成结构包括光源,光学监视器以及光被引导到的封装或波导。 |
授权日期 | 2003-12-30 |
申请日期 | 2001-03-20 |
专利号 | US6670599 |
专利状态 | 失效 |
申请号 | US09/813362 |
公开(公告)号 | US6670599 |
IPC 分类号 | H01L31/12 | H01S5/022 | H04B10/24 | H01S5/00 | H01S5/42 | H01S5/183 | H01S5/026 | H01L31/00 |
专利代理人 | - |
代理机构 | HALE AND DORR LLP |
文献类型 | 专利 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/40369 |
专题 | 半导体激光器专利数据库 |
作者单位 | II-VI PHOTONICS, (US) INC. |
推荐引用方式 GB/T 7714 | WAGNER, SIGURD,WAGNER, MATTHIAS,MA, EUGENE Y.,et al. Semitransparent optical detector on a flexible substrate and method of making. US6670599[P]. 2003-12-30. |
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文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
US6670599.PDF(506KB) | 专利 | 开放获取 | CC BY-NC-SA | 请求全文 |
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