Method for fabricating high efficiency semi-planar electro-optic modulators

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	Method for fabricating high efficiency semi-planar electro-optic modulators
其他题名	Method for fabricating high efficiency semi-planar electro-optic modulators
	MARTIN, WILLIAM E.
	1975-11-04
专利权人	THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY
公开日期	1975-11-04
授权国家	美国
专利类型	授权发明
摘要	High efficiency semi-planar electro-optic modulators are fabricated by deiting an electro-optic epitaxial waveguiding layer on a low resistivity single crystal substrate and then depositing first and second electrodes on opposite sides of the composition. After the natural cleavage plane of the substrate material has been determined, the composite material is aligned in a suitable scribing means and the substrate is scribed parallel to its natural cleavage plane along two widely spaced parallel lines defining the entrance and exit faces of a plurality of modulators; then the composite material is scribed with multiple closely spaced parallel lines at 90.degree. to the previously scribed widely spaced parallel lines, for cleaving the composite material in situ completing the formation of a plurality of the desired modulators. The cleaved side surfaces of the modulators confine light energy to the waveguide portion. If desired, an optical buffer layer may be deposited on the substrate before deposition of the waveguiding material to minimize optical losses.
其他摘要	通过在低电阻率单晶衬底上退出电光外延波导层，然后在组合物的相对侧上沉积第一和第二电极来制造高效半平面电光调制器。在确定了基板材料的自然解理面之后，复合材料在合适的划线装置中对准，并且基板沿着两个宽间隔的平行线平行于其自然解理面划线，所述平行线限定多个的入口和出口面。调制器;然后在90°C下用多条紧密间隔的平行线刻划复合材料。在先前划线的宽间隔平行线上，用于原位切割复合材料，完成多个所需调制器的形成。调制器的劈开侧表面将光能限制在波导部分。如果需要，可以在沉积波导材料之前在衬底上沉积光学缓冲层，以使光学损失最小化。
授权日期	1975-11-04
申请日期	1974-07-01
专利号	US3916510
专利状态	失效
申请号	US05/484484
公开（公告）号	US3916510
IPC 分类号	G02F1/035 \| G02F1/01 \| H01L21/00 \| B01J17/00
专利代理人	-
代理机构	SCIASCIA, R. S. RUBENS, G. J. MCLAREN, J. W.
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/40096
专题	半导体激光器专利数据库
作者单位	THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY
推荐引用方式 GB/T 7714	MARTIN, WILLIAM E.. Method for fabricating high efficiency semi-planar electro-optic modulators. US3916510[P]. 1975-11-04.

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