Method for manufacturing multi-dimensional target waveguide grating and volume grating with micro-structure quasi-phase-matching

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	Method for manufacturing multi-dimensional target waveguide grating and volume grating with micro-structure quasi-phase-matching
其他题名	Method for manufacturing multi-dimensional target waveguide grating and volume grating with micro-structure quasi-phase-matching
	SHI, YUECHUN; CHEN, XIANGFEI
	2014-09-16
专利权人	NANJING UNIVERSITY
公开日期	2014-09-16
授权国家	美国
专利类型	授权发明
摘要	A method for manufacturing a multi-dimensional target waveguide grating and volume grating with micro-structure quasi-phase-matching. An ordinary waveguide grating is used as a seed grating, and on this basis, a two-dimensional or three-dimensional sampling structure modulated with a refractive index, that is, a sampling grating, is formed. The sampling grating comprises multiple shadow gratings, and one of the shadow gratings is selected as a target equivalent grating. A sampled grating comprises Fourier components in many orders, that is, shadow gratings, a corresponding grating wave vector is [Formula 1], and the grating profile of all the shadow gratings changes with the sampling structure [Formula 2]. In a case where a seed grating wave vector [Formula 3] and a required two-dimensional or three-dimensional grating wave vector do not match, a certain Fourier periodic structure component of the Fourier components of the sampling structure is used to compensate for the wave vector mismatch. The manufacturing method may be applied to design and manufacture a multi-dimensional target waveguide grating and volume grating for any grating profile, and may simplify the grating manufacturing process and also make possible a variety of grating-based photon devices.
其他摘要	一种制造具有微结构准相位匹配的多维目标波导光栅和体光栅的方法。普通的波导光栅用作种子光栅，在此基础上，形成用折射率调制的二维或三维采样结构，即采样光栅。采样光栅包括多个阴影光栅，并且选择一个阴影光栅作为目标等效光栅。采样光栅包括许多阶的傅里叶分量，即阴影光栅，相应的光栅波矢量是[公式1]，并且所有阴影光栅的光栅轮廓随采样结构[公式2]而变化。在种子光栅波矢量[公式3]和所需的二维或三维光栅波矢量不匹配的情况下，采样结构的傅立叶分量的某个傅里叶周期结构分量用于补偿波向量不匹配。该制造方法可以应用于设计和制造用于任何光栅轮廓的多维目标波导光栅和体光栅，并且可以简化光栅制造工艺并且还使各种基于光栅的光子器件成为可能。
授权日期	2014-09-16
申请日期	2011-12-30
专利号	US8835204
专利状态	授权
申请号	US13/977718
公开（公告）号	US8835204
IPC 分类号	H01L21/00 \| G02B6/26 \| G02B6/42 \| G02B6/34 \| G02B27/00 \| G02B5/18 \| G02B6/122 \| H01S5/20
专利代理人	-
代理机构	TREASURE IP GROUP
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/38587
专题	半导体激光器专利数据库
作者单位	NANJING UNIVERSITY
推荐引用方式 GB/T 7714	SHI, YUECHUN,CHEN, XIANGFEI. Method for manufacturing multi-dimensional target waveguide grating and volume grating with micro-structure quasi-phase-matching. US8835204[P]. 2014-09-16.

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