Optical microresonator device with thermal isolation

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	Optical microresonator device with thermal isolation
其他题名	Optical microresonator device with thermal isolation
	SHAW, MICHAEL J.
	2019-04-02
专利权人	NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC
公开日期	2019-04-02
授权国家	美国
专利类型	授权发明
摘要	A thermal microring optical sensor is configured such that a portion of the optical resonator and its associated waveguide are encased within a cladding structure to minimize scattering losses along the waveguide and also provide improved evanescent coupling efficiency between the waveguide and the resonator. Functioning as a thermal sensor, incoming radiation modifies the temperature of the resonator, which changes its resonant frequency and, as a result, the percentage of light that it evanescently couples from the waveguide. The cladding structure also functions as a mechanical support for the resonator disk, eliminating the need for a pedestal to suspend the disk above the support substrate. Thermally-induced buckling of the optical waveguide is also reduced by encasing the susceptible portion of the waveguiding within the cladding structure.
其他摘要	热微环光学传感器被配置成使得光学谐振器的一部分及其相关联的波导被封装在包层结构内，以使沿波导的散射损失最小化，并且还提供波导和谐振器之间的改善的渐逝耦合效率。作为热传感器，入射辐射改变了谐振器的温度，这改变了谐振频率，并因此改变了它从波导中渐逝耦合的光的百分比。包层结构还用作谐振器盘的机械支撑，从而不需要基座将盘悬挂在支撑基板上方。通过将波导的敏感部分包围在包层结构内，也减小了光波导的热致弯曲。
授权日期	2019-04-02
申请日期	2017-07-27
专利号	US10247676
专利状态	授权
申请号	US15/661725
公开（公告）号	US10247676
IPC 分类号	G01N21/77 \| G01J5/44 \| G02B6/12 \| G02B6/024 \| G02B6/293 \| G01J5/08 \| G02B6/02 \| G01N21/68
专利代理人	FINSTON, MARTIN I. \| KOBA, WENDY W.
代理机构	CAPITOL PATENT & TRADEMARK LAW FIRM
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/38015
专题	半导体激光器专利数据库
作者单位	NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC
推荐引用方式 GB/T 7714	SHAW, MICHAEL J.. Optical microresonator device with thermal isolation. US10247676[P]. 2019-04-02.

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