Micro heat transfer arrays, micro cold plates, and thermal management systems for cooling semiconductor devices, and methods for using and making such arrays, plates, and systems

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	Micro heat transfer arrays, micro cold plates, and thermal management systems for cooling semiconductor devices, and methods for using and making such arrays, plates, and systems
其他题名	Micro heat transfer arrays, micro cold plates, and thermal management systems for cooling semiconductor devices, and methods for using and making such arrays, plates, and systems
	CHEN, RICHARD T.; TAN, WILL J.
	2018-04-24
专利权人	MICROFABRICA INC.
公开日期	2018-04-24
授权国家	美国
专利类型	授权发明
摘要	Embodiments of the present invention are directed to heat transfer arrays, cold plates including heat transfer arrays along with inlets and outlets, and thermal management systems including cold-plates, pumps and heat exchangers. These devices and systems may be used to provide cooling of semiconductor devices and particularly such devices that produce high heat concentrations. The heat transfer arrays may include microjets, microchannels, fins, and even integrated microjets and fins.
其他摘要	本发明的实施例涉及传热阵列，包括传热阵列以及入口和出口的冷板以及包括冷板，泵和热交换器的热管理系统。这些装置和系统可用于提供半导体装置的冷却，特别是可产生高热量浓度的装置。传热阵列可以包括微射流，微通道，翅片，甚至集成的微射流和翅片。
授权日期	2018-04-24
申请日期	2016-09-30
专利号	US9953899
专利状态	授权
申请号	US15/283013
公开（公告）号	US9953899
IPC 分类号	H01L23/473 \| H05K7/20 \| H01L21/48 \| F28F3/12 \| F28F13/06
专利代理人	SMALLEY, DENNIS R.
代理机构	-
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/37917
专题	半导体激光器专利数据库
作者单位	MICROFABRICA INC.
推荐引用方式 GB/T 7714	CHEN, RICHARD T.,TAN, WILL J.. Micro heat transfer arrays, micro cold plates, and thermal management systems for cooling semiconductor devices, and methods for using and making such arrays, plates, and systems. US9953899[P]. 2018-04-24.

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