Multi-chip modules with vertically aligned grating couplers for transmission of light signals between optical waveguides

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	Multi-chip modules with vertically aligned grating couplers for transmission of light signals between optical waveguides
其他题名	Multi-chip modules with vertically aligned grating couplers for transmission of light signals between optical waveguides
	GAMBINO, JEFFREY P.; LEIDY, ROBERT K.; ELLIS-MONAGHAN, JOHN J.; CUCCI, BRETT T.; MALING, JEFFREY C.; ROSENBERG, JESSIE C.
	2017-07-25
专利权人	GLOBALFOUNDRIES INC.
公开日期	2017-07-25
授权国家	美国
专利类型	授权发明
摘要	Disclosed are multi-chip modules (MCMs) that allow for chip-to-chip transmission of light signals. The MCMs can incorporate at least two components, which are attached (e.g., by interconnects). For example, in one MCM disclosed herein, the two components can be an integrated circuit chip and an interposer to which the integrated circuit chip and one or more additional integrated circuit chips are attached by interconnects. In another MCM disclosed herein, the two components can be two integrated circuit chips that are stacked and attached to each other by interconnects. In either case, the two components can each have a waveguide and a grating coupler coupled to one end of the waveguide. The grating couplers on the different components can be approximately vertically aligned, thereby allowing light signals to be transmitted between the waveguides on those different components. Also, disclosed herein are methods of forming such MCMs.
其他摘要	公开了允许光信号的芯片到芯片传输的多芯片模块（MCM）。 MCM可以包含至少两个组件，其被附接（例如，通过互连）。例如，在本文公开的一个MCM中，两个组件可以是集成电路芯片和内插器，集成电路芯片和一个或多个附加集成电路芯片通过互连附接到该内插器。在本文公开的另一MCM中，两个组件可以是两个集成电路芯片，其通过互连堆叠并彼此附接。在任一种情况下，两个部件都可以具有波导和耦合到波导一端的光栅耦合器。不同组件上的光栅耦合器可以近似垂直对齐，从而允许光信号在那些不同组件上的波导之间传输。此外，本文公开了形成这种MCM的方法。
授权日期	2017-07-25
申请日期	2016-09-13
专利号	US9715064
专利状态	授权
申请号	US15/263817
公开（公告）号	US9715064
IPC 分类号	G02B6/124 \| G02B6/34 \| G02B6/12
专利代理人	LESTRANGE, ESQ., MICHAEL J.
代理机构	GIBB & RILEY, LLC
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/37910
专题	半导体激光器专利数据库
作者单位	GLOBALFOUNDRIES INC.
推荐引用方式 GB/T 7714	GAMBINO, JEFFREY P.,LEIDY, ROBERT K.,ELLIS-MONAGHAN, JOHN J.,et al. Multi-chip modules with vertically aligned grating couplers for transmission of light signals between optical waveguides. US9715064[P]. 2017-07-25.

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