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Semiconductor structure with two optically coupled optical resonant cavities and method of manufacturing such a structure
其他题名Semiconductor structure with two optically coupled optical resonant cavities and method of manufacturing such a structure
BADANO, GIACOMO; KRISO, CHRISTIAN
2017-12-26
专利权人COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
公开日期2017-12-26
授权国家美国
专利类型授权发明
摘要The invention relates to a semiconductor structure intended to receive an electromagnetic wave. The semiconductor structure comprises at least one first semiconductor resonant optical cavity conformed to absorb at least partially the electromagnetic wave and to provide an electrical signal proportional to the part of the electromagnetic wave absorbed. The semiconductor structure further includes a second dielectric resonant optical cavity of which a resonance wavelength is comprised in the predetermined range of wavelengths and is preferentially equal to the wavelength λ0, the second resonant optical cavity being laid out to intercept at least part of the electromagnetic wave and being optically coupled to the first resonant optical cavity. The second resonant optical cavity is transparent to the predetermined range of wavelengths. The invention further relates to a semiconductor component comprising such a semiconductor structure and a method of manufacturing such a semiconductor structure.
其他摘要本发明涉及一种用于接收电磁波的半导体结构。该半导体结构包括至少一个第一半导体谐振光学腔,其适于至少部分地吸收电磁波并提供与所吸收的电磁波的一部分成比例的电信号。该半导体结构还包括第二介质谐振光学腔,其谐振波长包括在预定的波长范围内并且优选地等于波长λ 0 ,第二谐振光学腔被布置成截取至少部分电磁波并光学耦合到第一谐振光学腔。第二谐振光学腔对预定的波长范围是透明的。本发明还涉及包括这种半导体结构的半导体组件和制造这种半导体结构的方法。
授权日期2017-12-26
申请日期2016-02-01
专利号US9853173
专利状态授权
申请号US15/011964
公开(公告)号US9853173
IPC 分类号H01L31/0203 | H01L31/103 | H01L31/0216 | H01L31/0232 | H01L31/105 | H01L31/18
专利代理人-
代理机构OBLON, MCCLELLAND, MAIER & NEUSTADT, L.L.P.
文献类型专利
条目标识符http://ir.opt.ac.cn/handle/181661/37868
专题半导体激光器专利数据库
作者单位COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
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GB/T 7714
BADANO, GIACOMO,KRISO, CHRISTIAN. Semiconductor structure with two optically coupled optical resonant cavities and method of manufacturing such a structure. US9853173[P]. 2017-12-26.
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