Xi'an Institute of Optics and Precision Mechanics,CAS
Optical interposer | |
其他题名 | Optical interposer |
KOSENKO, VALENTIN; MCBAIN, EDWARD LEE; UZOH, CYPRIAN EMEKA; MONADGEMI, PEZHMAN; SAVASTIOUK, SERGEY | |
2014-06-24 | |
专利权人 | INVENSAS CORPORATION |
公开日期 | 2014-06-24 |
授权国家 | 美国 |
专利类型 | 授权发明 |
摘要 | An optical interposer includes grooves (310) for optical fiber cables (104) coupled to a transducer (120). The grooves are formed by etching a cavity (410) in a substrate (130), filling the cavity with some layer (520), then etching the layer to form the grooves. The cavity has outwardly sloped sidewalls on which mirrors (144) are later formed. The groove etch is selective not to damage the sidewalls. The groove depth is uniform due to high etch selectivity of the layer, and also because of good control over the cavity etch due to the low aspect ratio of the cavity. Electrical circuitry for connection to the transducer is fabricated after the cavity filling but before the groove etch. The cavity filling leaves the wafer planar, facilitating fabrication of the electrical circuitry. Grooves can be provided on top and bottom of the interposer. Other features are also provided. |
其他摘要 | 光学插入器包括用于耦合到换能器(120)的光纤线缆(104)的凹槽(310)。通过蚀刻衬底(130)中的腔(410),用一些层(520)填充腔,然后蚀刻该层以形成凹槽来形成凹槽。腔具有向外倾斜的侧壁,后面形成镜子(144)。凹槽蚀刻是选择性的,不会损坏侧壁。由于层的高蚀刻选择性,沟槽深度是均匀的,并且还由于腔的低纵横比导致对腔蚀刻的良好控制。在腔填充之后但在凹槽蚀刻之前制造用于连接到换能器的电路。腔填充使晶片平面化,便于电路的制造。可以在插入器的顶部和底部提供凹槽。还提供其他功能。 |
授权日期 | 2014-06-24 |
申请日期 | 2012-01-31 |
专利号 | US8757897 |
专利状态 | 授权 |
申请号 | US13/362898 |
公开(公告)号 | US8757897 |
IPC 分类号 | G02B6/36 |
专利代理人 | - |
代理机构 | HAYNES AND BOONE, LLP |
文献类型 | 专利 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/37569 |
专题 | 半导体激光器专利数据库 |
作者单位 | INVENSAS CORPORATION |
推荐引用方式 GB/T 7714 | KOSENKO, VALENTIN,MCBAIN, EDWARD LEE,UZOH, CYPRIAN EMEKA,et al. Optical interposer. US8757897[P]. 2014-06-24. |
条目包含的文件 | ||||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
US8757897.PDF(2125KB) | 专利 | 开放获取 | CC BY-NC-SA | 请求全文 |
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