Laser irradiating method and device for same

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	Laser irradiating method and device for same
其他题名	Laser irradiating method and device for same
	SHIDA, JUNICHI; CHUNG, SUK-HWAN; URYU, SHUICHI
	2008-12-30
专利权人	THE JAPAN STEEL WORKS, LTD.
公开日期	2008-12-30
授权国家	美国
专利类型	授权发明
摘要	Because a focal distance of a condenser lens is changed due to a change in temperature, when irradiation of a laser beam is restarted after the irradiation has stopped, it takes a long time to restore a temperature of the cooled lens to a given temperature, and the operating efficiency is deteriorated. A first mirror 5 that can be located at a reflection position I at which an optical path is blocked and a laser beam a is reflected, and a second mirror 6 that reflects the laser beam a which is reflected by the first mirror 5 are disposed between the condenser lens 2 and the object to be irradiated 4. The first mirror 5 is located at the reflection position I so that the laser beam a that is transmitted through the condenser lens 2 is sequentially reflected by the first and second mirrors 5 and 6, and an intensity of the laser beam a that is again reflected by the first mirror 5 is made to coincide with an intensity of the laser beam a that is reflected from the object to be irradiated 4, and the condenser lens 2 is heated in the same manner that the processing laser beam a is transmitted through the condenser lens 2 and irradiated on the object to be irradiated 4.
其他摘要	因为聚光透镜的焦距由于温度的变化而改变，所以当在照射停止后重新开始照射激光束时，将冷却的透镜的温度恢复到给定温度需要很长时间，并且运行效率恶化。可以位于阻挡光路和反射激光束a的反射位置I的第一反射镜5和反射由第一反射镜5反射的激光束a的第二反射镜6设置在第一反射镜5和第二反射镜6之间。第一反射镜5位于反射位置I，使得透过聚光透镜2的激光束a被第一和第二反射镜5和6依次反射，第一反射镜5位于反射位置I。并且，再次被第一反射镜5反射的激光束a的强度与从被照射物体4反射的激光束a的强度一致，并且聚光透镜2在其中被加热处理激光束a透过聚光透镜2并照射在待照射物体4上的方式。
授权日期	2008-12-30
申请日期	2006-06-02
专利号	US7471712
专利状态	授权
申请号	US11/662971
公开（公告）号	US7471712
IPC 分类号	H01S3/08 \| G02B7/02 \| H01S3/04
专利代理人	-
代理机构	WENDEROTH,LIND & PONACK,L.L.P.
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/37228
专题	半导体激光器专利数据库
作者单位	THE JAPAN STEEL WORKS, LTD.
推荐引用方式 GB/T 7714	SHIDA, JUNICHI,CHUNG, SUK-HWAN,URYU, SHUICHI. Laser irradiating method and device for same. US7471712[P]. 2008-12-30.

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