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Electroosmotic microchannel cooling system
其他题名Electroosmotic microchannel cooling system
GOODSON, KENNETH E.; CHEN, CHUAN-HUA; HUBER, DAVID E.; JIANG, LINAN; KENNY, THOMAS W.; KOO, JAE-MO; LASER, DANIEL J.; MIKKELSEN, JAMES C.; SANTIAGO, JUAN G.; WANG, EVELYN NING-YI; ZENG, SHULIN; ZHANG, LIAN
2005-09-13
专利权人BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY
公开日期2005-09-13
授权国家美国
专利类型授权发明
摘要Apparatus and methods according to the present invention preferably utilize electroosmotic pumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. These electroosmotic pumps are preferably fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These electroosmotic pumps also preferably allow for recapture of evolved gases and deposited materials, which may provide for long-term closed-loop operation. Apparatus and methods according to the present invention also allow active regulation of the temperature of the device through electrical control of the flow through the pump and can utilize multiple cooling loops to allow independent regulation of the special and temporal characteristics of the device temperature profiles. Novel microchannel structures are also described.
其他摘要根据本发明的装置和方法优选地使用电渗泵,其能够产生高压和流动而不移动机械部件以及相关的不可接受的电和噪声噪声的产生,以及相关的可靠性降低。这些电渗泵优选地由相对于目前可用的微泵提高性能,效率并减轻重量和制造成本的材料和结构制造。这些电渗泵还优选地允许重新捕获逸出的气体和沉积的材料,这可以提供长期的闭环操作。根据本发明的装置和方法还允许通过对通过泵的流动的电控制来主动调节装置的温度,并且可以利用多个冷却回路来允许独立调节装置温度曲线的特殊和时间特性。还描述了新颖的微通道结构。
授权日期2005-09-13
申请日期2002-01-19
专利号US6942018
专利状态失效
申请号US10/053859
公开(公告)号US6942018
IPC 分类号F04B19/00 | F28D15/00 | H01L23/34 | H01L23/473 | H05K7/20 | B81B1/00 | F04F99/00 | F25D1/02 | F25D9/00 | F28F7/00
专利代理人-
代理机构WOMBLE CARLYLE,SANDRIDGE & RICE,PLLC
文献类型专利
条目标识符http://ir.opt.ac.cn/handle/181661/36822
专题半导体激光器专利数据库
作者单位BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY
推荐引用方式
GB/T 7714
GOODSON, KENNETH E.,CHEN, CHUAN-HUA,HUBER, DAVID E.,et al. Electroosmotic microchannel cooling system. US6942018[P]. 2005-09-13.
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