Diamond heat sink including microchannel therein and methods for manufacturing diamond heat sinks

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	Diamond heat sink including microchannel therein and methods for manufacturing diamond heat sinks
其他题名	Diamond heat sink including microchannel therein and methods for manufacturing diamond heat sinks
	SHIOMI, HIROMU; NAKAHATA, HIDEAKI; NISHIBAYASHI, YOSHIKI; SHIKATA, SHIN-ICHI
	1999-02-23
专利权人	SUMITOMO ELECTRIC INDUSTRIES, LTD.
公开日期	1999-02-23
授权国家	美国
专利类型	授权发明
摘要	A diamond heat sink of the present invention comprises: a support layer consisting of substantially undoped diamond; a heat sensitive layer consisting of doped diamond, disposed on the surface of the support layer; an insulation layer consisting of substantially undoped diamond, disposed on a predetermined region in the surface of the heat sensitive layer; electrodes disposed on the heat sensitive layer, wherein an exothermal device is placed on the surface of the insulation layer; and a cooling structure disposed on the backside of the support layer, the cooling structure having at least one microchannel, the microchannel being defined by a diamond, wherein an exothermal device is to be placed on the surface of the insulation layer; and wherein the heat sensitive layer and the electrodes form a thermistor, the electrical resistivity of the thermistor being capable of varying corresponding to heat generated from the exothermal device and transferred through the insulation layer to the thermistor.
其他摘要	本发明的金刚石散热器包括：由基本上未掺杂的金刚石组成的支撑层;由掺杂金刚石组成的热敏层，设置在支撑层的表面上;绝缘层，由基本上未掺杂的金刚石构成，设置在热敏层表面的预定区域上;设置在热敏层上的电极，其中放热装置放置在绝缘层的表面上;冷却结构设置在支撑层的背面，冷却结构具有至少一个微通道，微通道由金刚石限定，其中放热装置放置在绝缘层的表面上;并且其中热敏层和电极形成热敏电阻，热敏电阻的电阻率能够对应于从放热装置产生的热量而变化，并通过绝缘层传递到热敏电阻。
授权日期	1999-02-23
申请日期	1997-04-14
专利号	US5874775
专利状态	失效
申请号	US08/840161
公开（公告）号	US5874775
IPC 分类号	H01L23/373 \| H01L23/38 \| H01L23/34 \| H01L23/06
专利代理人	-
代理机构	PENNIE & EDMONDS LLP
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/36396
专题	半导体激光器专利数据库
作者单位	SUMITOMO ELECTRIC INDUSTRIES, LTD.
推荐引用方式 GB/T 7714	SHIOMI, HIROMU,NAKAHATA, HIDEAKI,NISHIBAYASHI, YOSHIKI,et al. Diamond heat sink including microchannel therein and methods for manufacturing diamond heat sinks. US5874775[P]. 1999-02-23.

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