Xi'an Institute of Optics and Precision Mechanics,CAS
| Metallized paths on diamond surfaces | |
| 其他题名 | Metallized paths on diamond surfaces |
| DAUTREMONT-SMITH, WILLIAM C.; FELDMAN, LEONARD C.; KALISH, RAFAEL; KATZ, AVISHAY; MILLER, BARRY; MORIYA, NETZER | |
| 1994-08-02 | |
| 专利权人 | AT&T BELL LABORATORIES |
| 公开日期 | 1994-08-02 |
| 授权国家 | 美国 |
| 专利类型 | 授权发明 |
| 摘要 | A graphite path is formed along the surface of a diamond plate, preferably a CVD diamond plate, by means of a laser or ion-implantation induced conductivity. The path advantageously can be the surface of a sidewall of a via hole drilled by the laser through the plate or a path running along a side surface of the plate from top to bottom opposed major surfaces of the plate. The graphite path is metallized, as by electroplating or electroless plating. In this way, for example, an electrically conducting connection can be made between a metallized backplane located on the bottom surface of the plate and a wire-bonding pad located on the top surface of the plate. |
| 其他摘要 | 通过激光或离子注入诱导的导电性沿着金刚石板的表面，优选CVD金刚石板形成石墨路径。该路径有利地可以是激光器通过板钻出的通孔的侧壁的表面，或者是从板的顶部到底部相对的主表面沿着板的侧表面延伸的路径。石墨路径通过电镀或无电镀金属化。以这种方式，例如，可以在位于板的底表面上的金属化背板和位于板的顶表面上的引线键合焊盘之间形成导电连接。 |
| 授权日期 | 1994-08-02 |
| 申请日期 | 1992-11-19 |
| 专利号 | US5334306 |
| 专利状态 | 失效 |
| 申请号 | US07/973611 |
| 公开（公告）号 | US5334306 |
| IPC 分类号 | H01L23/373 | H01L21/02 | H01L21/48 | H01L23/34 | H05K3/10 | C01B31/06 | H01L21/203 | H01L21/52 | H01L23/12 | H01S3/00 | C25D5/02 | C25D5/54 | C25D7/12 |
| 专利代理人 | - |
| 代理机构 | CAPLAN, D. I. |
| 文献类型 | 专利 |
| 条目标识符 | http://ir.opt.ac.cn/handle/181661/36123 |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | AT&T BELL LABORATORIES |
| 推荐引用方式 GB/T 7714 | DAUTREMONT-SMITH, WILLIAM C.,FELDMAN, LEONARD C.,KALISH, RAFAEL,et al. Metallized paths on diamond surfaces. US5334306[P]. 1994-08-02. |
| 条目包含的文件 | ||||||
| 文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
| US5334306.PDF（199KB） | 专利 | 开放获取 | CC BY-NC-SA | 请求全文 | ||
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