Optical displacement sensor having a semiconductor laser light source using an optical element which can control beam angle and a beam shape

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	Optical displacement sensor having a semiconductor laser light source using an optical element which can control beam angle and a beam shape
其他题名	Optical displacement sensor having a semiconductor laser light source using an optical element which can control beam angle and a beam shape
	KOMAZAKI, IWAO; YAMAMOTO, EIJI
	2003-10-07
专利权人	OLYMPUS OPTICAL CO., LTD.
公开日期	2003-10-07
授权国家	美国
专利类型	授权发明
摘要	An optical displacement sensor includes a laser light source, a scale, a photodetector, and an optical element which refracts light beams to the scale. The scale is displaced in a fashion traversing the light beams and includes a periodic pattern formed thereon to generate a diffractive interference pattern from the light beams. The photodetector receives at least a portion of the pattern and includes a photodetector array comprising plural light receiving areas having a period of np1 (z1+z2)/z1 in a pitch direction of the pattern on a surface of the photodetector. A distance between an emission surface of the laser light source and a surface of the scale is defined as z A distance between the surface of the scale and a light receiving surface of the photodetector is defined as z2. A pitch of the periodic pattern is defined as p1, and n denotes a natural number.
其他摘要	光学位移传感器包括激光光源，标尺，光电探测器和将光束折射到标尺的光学元件。标尺以穿过光束的方式移位，并包括在其上形成的周期性图案，以从光束产生衍射干涉图案。光电探测器接收图案的至少一部分并包括光电探测器阵列，该光电探测器阵列包括多个光接收区域，该光接收区域在光电探测器的表面上的图案的俯仰方向上具有np1（z1 + z2）/ z1的周期。激光光源的发射表面和标尺表面之间的距离定义为z1。标尺表面和光电探测器的光接收表面之间的距离定义为z2。周期性图案的间距定义为p1，n表示自然数。
授权日期	2003-10-07
申请日期	2000-05-30
专利号	US6631005
专利状态	失效
申请号	US09/583010
公开（公告）号	US6631005
IPC 分类号	G01D5/38 \| G01D5/26 \| G02B6/124 \| H01S5/00 \| H01S5/187 \| G01B11/00 \| G01B9/02
专利代理人	-
代理机构	FRISHAUF,HOLTZ,GOODMAN & CHICK,P.C.
文献类型	专利
条目标识符	http://ir.opt.ac.cn/handle/181661/35350
专题	半导体激光器专利数据库
作者单位	OLYMPUS OPTICAL CO., LTD.
推荐引用方式 GB/T 7714	KOMAZAKI, IWAO,YAMAMOTO, EIJI. Optical displacement sensor having a semiconductor laser light source using an optical element which can control beam angle and a beam shape. US6631005[P]. 2003-10-07.

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