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Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation
Wang, Xuewen1,2,3; Theogene, Barayavuga1,2; Mei, Huanhuan4; Zhang, Jianwei1,2; Huang, Chenchen1,2; Ren, Xiaoying1,2; Xu, Muxun1
作者部门瞬态光学研究室
2019-09-10
发表期刊FERROELECTRICS
ISSN0015-0193;1563-5112
卷号549期号:1(SI)页码:70-77
产权排序3
摘要

The AFM tip induced local anodic oxidation (LAO) nanolithography is capable of manufacturing nanometer scale structures and devices for future generation. Experimental studies of LAO on silicon surface, implemented in atmospheric environment by AFM, are presented in this paper. A series of nanostructures with complex patterns was fabricated and analyzed by AFM. The results indicated that various of parameters, such as the applied voltage, pulse time, and ambient humidity, have a strong impact on the height of the nanostructures generated in this way. An advantage of the presented approach is to be utilized in future processing steps in the same environment.

关键词Local anodic oxidation nanolithography atomic force microscope silicon surface
DOI10.1080/00150193.2019.1592545
收录类别SCI ; EI
语种英语
WOS记录号WOS:000494798800008
出版者TAYLOR & FRANCIS LTD
EI入藏号20194407602096
引用统计
被引频次:2[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/31916
专题瞬态光学研究室
通讯作者Wang, Xuewen
作者单位1.Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Shaanxi, Peoples R China
2.Xi An Jiao Tong Univ, Shaanxi Key Lab Intelligent Robots, Xian, Shaanxi, Peoples R China
3.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian, Shaanxi, Peoples R China
4.Changan Univ, Sch Construct Machinery, Xian, Shaanxi, Peoples R China
推荐引用方式
GB/T 7714
Wang, Xuewen,Theogene, Barayavuga,Mei, Huanhuan,et al. Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation[J]. FERROELECTRICS,2019,549(1(SI)):70-77.
APA Wang, Xuewen.,Theogene, Barayavuga.,Mei, Huanhuan.,Zhang, Jianwei.,Huang, Chenchen.,...&Xu, Muxun.(2019).Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation.FERROELECTRICS,549(1(SI)),70-77.
MLA Wang, Xuewen,et al."Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation".FERROELECTRICS 549.1(SI)(2019):70-77.
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