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Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse
Liu, Xin1,2,3; Sanner, Nicolas3; Sentis, Marc3; Stoian, Razvan4; Zhao, Wei1; Cheng, Guanghua1; Uteza, Olivier3
作者部门瞬态光学技术国家重点实验室
2018-02-01
发表期刊APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
ISSN0947-8396
卷号124期号:2
产权排序1
摘要

Single-shot Gaussian-Bessel laser beams of 1 ps pulse duration and of similar to 0.9 mu m core size and similar to 60 mu m depth of focus are used for drilling micro-channels on front side of fused silica in ambient condition. Channels ablated at different pulse energies are fully characterized by AFM and post-processing polishing procedures. We identify experimental energy conditions (typically 1.5 mu J) suitable to fabricate non-tapered channels with mean diameter of similar to 1.2 mu m and length of similar to 40 mu m while maintaining an utmost quality of the front opening of the channels. In addition, by further applying accurate post-polishing procedure, channels with high surface quality and moderate aspect ratio down to a few units are accessible, which would find interest in the surface micro-structuring of materials, with perspective of further scalability to meta-material specifications.

 

DOI10.1007/s00339-018-1634-1
收录类别SCI ; EI
语种英语
WOS记录号WOS:000424515500126
EI入藏号20180604758461
引用统计
文献类型期刊论文
条目标识符http://ir.opt.ac.cn/handle/181661/30782
专题瞬态光学技术国家重点实验室
作者单位1.Xian Inst Opt & Precis Mech CAS, State Key Lab Transient Opt & Photon, Xian 710119, Shaanxi, Peoples R China;
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China;
3.Aix Marseille Univ, CNRS, UMR LP3 7341, F-13288 Marseille, France;
4.Univ Jean Monnet, Univ Lyon, UMR CNRS 5516, Lab Hubert Curien, F-42000 St Etienne, France
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Liu, Xin,Sanner, Nicolas,Sentis, Marc,et al. Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,2018,124(2).
APA Liu, Xin.,Sanner, Nicolas.,Sentis, Marc.,Stoian, Razvan.,Zhao, Wei.,...&Uteza, Olivier.(2018).Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,124(2).
MLA Liu, Xin,et al."Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian-Bessel laser pulse".APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 124.2(2018).
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