Optical characteristics of an oxyfluoride glass waveguide formed by a proton implantation | |
Wang, Yue1; Shen, Yuan2; Zheng, Rin-Lin1; Shen, Jian-Ping1; Guo, Hai-Tao3; Liu, Chun-Xiao1 | |
作者部门 | 先进光电与生物材料研发中心 |
2018-09 | |
发表期刊 | RESULTS IN PHYSICS
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ISSN | 2211-3797 |
卷号 | 10页码:200-204 |
产权排序 | 3 |
摘要 | An optical waveguide was fabricated by H+ ion implantation with an energy of 400 keV and a dose of 8x10(16) ions/cm(2) in the oxyfluoride glass for the first time to the best of our knowledge. The dark mode spectra of the waveguide were measured by a prism coupling method before and after the thermal treatment. The number of modes was reduced after annealing. The implantation process of 400 keV H+ ions into the oxyfluoride glass was simulated by using the SRIM 2013 program. The refractive index distribution of the ion-implanted waveguide was reconstructed by the reflection calculation method. The refractive index was decreased in the waveguide region and there was an optical barrier with a reduced refractive index at the end of the ion range. The proton-implanted oxyfluoride glass waveguide is a desirable alternative for the fabrication of a compact optical integrated device. |
关键词 | Waveguide Ion implantatIon Oxyfluoride Glasses |
DOI | 10.1016/j.rinp.2018.06.001 |
收录类别 | SCI |
语种 | 英语 |
WOS记录号 | WOS:000443868900030 |
出版者 | ELSEVIER SCIENCE BV |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.opt.ac.cn/handle/181661/30639 |
专题 | 光子功能材料与器件研究室 |
通讯作者 | Liu, Chun-Xiao |
作者单位 | 1.Nanjing Univ Posts & Telecommun, Coll Elect & Optic Engn, Nanjing 210023, Jiangsu, Peoples R China 2.Hefei Normal Univ, Sch Elect & Informat Engn, Hefei 230601, Anhui, Peoples R China 3.Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 710119, Shaanxi, Peoples R China |
推荐引用方式 GB/T 7714 | Wang, Yue,Shen, Yuan,Zheng, Rin-Lin,et al. Optical characteristics of an oxyfluoride glass waveguide formed by a proton implantation[J]. RESULTS IN PHYSICS,2018,10:200-204. |
APA | Wang, Yue,Shen, Yuan,Zheng, Rin-Lin,Shen, Jian-Ping,Guo, Hai-Tao,&Liu, Chun-Xiao.(2018).Optical characteristics of an oxyfluoride glass waveguide formed by a proton implantation.RESULTS IN PHYSICS,10,200-204. |
MLA | Wang, Yue,et al."Optical characteristics of an oxyfluoride glass waveguide formed by a proton implantation".RESULTS IN PHYSICS 10(2018):200-204. |
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Optical characterist(889KB) | 期刊论文 | 出版稿 | 限制开放 | CC BY-NC-SA | 请求全文 |
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